Model for a Quartz-Crystal Tuning Fork Using Plate Spring Approximated to Torsion Spring Adopted at the Joint of the Arm and the Base

2003 ◽  
Vol 42 (Part 1, No. 5B) ◽  
pp. 3110-3114 ◽  
Author(s):  
Hideaki Itoh ◽  
Yoshiyuki Aoshima ◽  
Yuuki Sakaguchi
Keyword(s):  
Quartz Crystal ◽  
Tuning Fork ◽  
Torsion Spring ◽  
Plate Spring

Model for a Quartz-Crystal Tuning Fork Using Torsion Spring at the Joint of the Arm and the Base and Analysis of Its Frequency

2002 ◽  
Vol 41 (Part 1, No. 5B) ◽  
pp. 3422-3425 ◽  
Author(s):  
Hideaki Itoh ◽  
Yoshiaki Aoshima ◽  
Tamotsu Egawa
Keyword(s):  
Quartz Crystal ◽  
Tuning Fork ◽  
Torsion Spring

Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing

2014 ◽  
Vol 609-610 ◽  
pp. 1181-1184 ◽  
Author(s):  
Jian Wang ◽  
Cong Zhao ◽  
Shi Ming Zhang ◽  
Jiang Bo Zou
Keyword(s):  
High Resolution ◽  
Vibration Amplitude ◽  
Chemical Etching ◽  
Quartz Crystal ◽  
Tuning Fork ◽  
Ambient Condition ◽  
Force Sensing ◽  
Vibration Attenuation ◽  
Attenuation Structure ◽  
Crystal Wafer

This paper reports a novel piezoelectric quartz crystal double-ended tuning fork (DETF) resonator with vibration attenuation structure, which is suitable for high resolution force sensing. The DETF resonator was designed to work in the fundamental flexure mode, and manufactured along the Y direction based on the Z-cut quartz crystal wafer using photolithographic and anisotropic chemical etching of quartz crystal. The resonance frequency of the DETF resonator is 39.1KHz. Vibration amplitude of the DETF resonator was measured and the experimental results show that vibration amplitude of the joint of DETF resonator is almost three orders of magnitude lower than that of midpoint of DETF, and the quality factor is up to 7750 at ambient condition and 59600 in vacuum, respectively.

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