Fabrications of Si Thin-Film Solar Cells by Hot-Wire Chemical Vapor Deposition and Laser Doping Techniques

2006 ◽  
Vol 45 (4B) ◽  
pp. 3516-3518 ◽  
Author(s):  
Shui-Yang Lien ◽  
Dong-Sing Wuu ◽  
Hsin-Yuan Mao ◽  
Bing-Rui Wu ◽  
Yen-Chia Lin ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thin Film Solar Cells ◽  
Hot Wire ◽  
Laser Doping ◽  
Si Thin Film

scholarly journals Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition

2014 ◽  
Vol 2014 ◽  
pp. 1-5
Author(s):  
Hsin-Ying Lee ◽  
Ting-Chun Wang ◽  
Chun-Yen Tseng
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Laser Power ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
Thin Film Solar Cells ◽  
Si Films ◽  
Si Thin Film

The microcrystalline p-SiC/i-Si/n-Si thin film solar cells treated with hydrogen plasma were fabricated at low temperature using a CO2laser-assisted plasma enhanced chemical vapor deposition (LAPECVD) system. According to the micro-Raman results, the i-Si films shifted from 482 cm−1to 512 cm−1as the assisting laser power increased from 0 W to 80 W, which indicated a gradual transformation from amorphous to crystalline Si. From X-ray diffraction (XRD) results, the microcrystalline i-Si films with (111), (220), and (311) diffraction were obtained. Compared with the Si-based thin film solar cells deposited without laser assistance, the short-circuit current density and the power conversion efficiency of the solar cells with assisting laser power of 80 W were improved from 14.38 mA/cm2to 18.16 mA/cm2and from 6.89% to 8.58%, respectively.

Si thin film solar cells using SiH2Cl2 by rf plasma-enhanced chemical vapor deposition

2006 ◽  
Vol 352 (9-20) ◽  
pp. 1967-1971 ◽  
Author(s):  
Toru Saito ◽  
Yali Li ◽  
Yoshie Ikeda ◽  
Hajime Shirai
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thin Film Solar Cells ◽  
Rf Plasma ◽  
Si Thin Film

Si thin-film solar cells using SiH2Cl2 by rf plasma-enhanced chemical vapor deposition

2006 ◽  
Vol 511-512 ◽  
pp. 46-50 ◽  
Author(s):  
Yali Li ◽  
Yoshie Ikeda ◽  
Toru Saito ◽  
Hajime Shirai
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thin Film Solar Cells ◽  
Rf Plasma ◽  
Si Thin Film

scholarly journals Silicon nitride anti-reflection coatings for CdS/CuInSe2 thin film solar cells by electron beam assisted chemical vapor deposition

Solar Cells ◽  
1985 ◽  
Vol 14 (3) ◽  
pp. 289-291 ◽  
Author(s):  
B.J. Stanbery ◽  
W.S. Chen ◽  
R.A. Mickelsen ◽  
G.J. Collins ◽  
K.A. Emery ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Silicon Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thin Film Solar Cells ◽  
Cuinse2 Thin Film
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