Optical Design for the Optimum Solid Immersion Lens with High Numerical Aperture and Large Tolerance

2007 ◽  
Vol 46 (6B) ◽  
pp. 3724-3728 ◽  
Author(s):  
Narak Choi ◽  
Seongbo Shim ◽  
Tom D. Milster ◽  
Jaisoon Kim
Keyword(s):  
Optical Design ◽  
Numerical Aperture ◽  
Solid Immersion Lens ◽  
High Numerical Aperture

Sample Preparation for High Numerical Aperture Solid Immersion Lens Laser Imaging

2014 ◽  
Author(s):  
M.S. Wei ◽  
H.B. Chong ◽  
S.H. Lim ◽  
C. Richardson
Keyword(s):  
Sample Preparation ◽  
Focal Length ◽  
Numerical Aperture ◽  
Fault Isolation ◽  
Numerical Control ◽  
Thickness Variation ◽  
Solid Immersion Lens ◽  
Laser Imaging ◽  
High Numerical Aperture ◽  
Silicon Thickness

Abstract High resolution laser imaging, using high numerical aperture (NA) solid immersion lens (SIL) for backside fault isolation imposes stringent sample preparation requirements; as a result of the short focal length of SIL, a die must be thinned to a targeted thickness with less than a ±5 μm silicon thickness variation across the entire die. Flip chip packaged dice suffer from warpage due to various package sizes and substrate thicknesses. Such broad spectrums of part geometries pose a great challenge to meet such silicon planarity requirements. As relaxation of the packaged silicon during polishing causes the warpage profile to change dynamically and unpredictably throughout the thinning process, it has become an added challenge to meet the stringent sample preparation requirements. To overcome the stochastic nature of this problem, a two-step polishing recipe consisting of computer numerical control (CNC) mechanical milling and polishing processes has been developed to achieve sufficient silicon thickness uniformity to enable SIL imaging across an entire silicon chip as large as approximately 20 mm x 15 mm.

Optical design of high-numerical aperture lithographic lenses

2016 ◽  
Vol 24 (4) ◽  
pp. 740-746
Author(s):  
徐明飞 XU Ming-fei ◽  
庞武斌 PANG Wu-bin ◽  
徐象如 XU Xiang-ru ◽  
王新华 WANG Xin-hua ◽  
黄玮 HUANG Wei
Keyword(s):  
Optical Design ◽  
Numerical Aperture ◽  
High Numerical Aperture

A high numerical aperture solid immersion lens magneto-optical recording system

1999 ◽  
Vol 35 (5) ◽  
pp. 3100-3105 ◽  
Author(s):  
A. Chekanov ◽  
M. Birukawa ◽  
Y. Itoh ◽  
T. Suzuki
Keyword(s):  
Numerical Aperture ◽  
Optical Recording ◽  
Recording System ◽  
Solid Immersion Lens ◽  
High Numerical Aperture

Optical design of high numerical aperture extreme ultraviolet lithography objective with freeform surfaces

2019 ◽  
Vol 48 (8) ◽  
pp. 814002
Author(s):  
毛姗姗 Mao Shanshan ◽  
李艳秋 Li Yanqiu ◽  
刘 克 Liu Ke ◽  
刘丽辉 Liu Lihui ◽  
郑 猛 Zheng Meng ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Optical Design ◽  
Numerical Aperture ◽  
Extreme Ultraviolet Lithography ◽  
Freeform Surfaces ◽  
Ultraviolet Lithography ◽  
High Numerical Aperture

Solid Immersion Lens Optical Head for High-Numerical-Aperture Cover-Layered Incident Near-Field Recording

2009 ◽  
Vol 48 (3) ◽  
pp. 03A040 ◽  
Author(s):  
Yong-Joong Yoon ◽  
Cheol-Ki Min ◽  
Wan-Chin Kim ◽  
No-Cheol Park ◽  
Young-Pil Park ◽  
...  
Keyword(s):  
Near Field ◽  
Numerical Aperture ◽  
Solid Immersion Lens ◽  
High Numerical Aperture ◽  
Optical Head ◽  
Field Recording

A Novel Living-Cell Imaging System Design with Ultra-Long Working Distance and High Numerical Aperture

2007 ◽  
Vol 364-366 ◽  
pp. 1077-1082
Author(s):  
Guo Liang Huang ◽  
Zhong Hua Dong ◽  
Cheng Deng ◽  
Shu Kuan Xu ◽  
Jiang Zhu ◽  
...  
Keyword(s):  
Optical Imaging ◽  
Imaging System ◽  
Optical Design ◽  
Numerical Aperture ◽  
Living Cells ◽  
Culture Solution ◽  
High Numerical Aperture ◽  
Cells In Culture ◽  
Working Distance ◽  
Living Cell Imaging

Microscopy is an important tool in biology and medicine, but it is often limited to optical imaging structures with high numerical aperture(NA) with a short working distance(wd), for example NA = 0.6 and wd <1 mm are usual. The common microscope objective is inadequate for imaging of living cells in culture as an optical imaging structure with both high numerical aperture and long working distance is required. In this study, a novel optical design has been developed to meet the long working distance and high resolution power imaging of living cells in a vessel with a high culture solution thickness, where cells need to be developed in about 48 hours or a week. The developed optical design was characterized by an ultra-long working distance (wd >13.5 mm) and high numerical aperture (NA = 0.7). This optical imaging system is not only good for the subcellular imaging of free-floating cells in culture, but also for the imaging of cells attached at a surface of vessel.

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