Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp

2012 ◽  
Vol 51 ◽  
pp. 116202
Author(s):  
Mari Inoue ◽  
Takayuki Ohta ◽  
Naoki Takota ◽  
Shigeki Tsuchitani ◽  
Seigo Takashima ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Gas Phase ◽  
Hollow Cathode ◽  
Oxide Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Hollow Cathode Lamp ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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