Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp
2012 ◽
Vol 51
(11R)
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pp. 116202
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2013 ◽
Vol 52
(3R)
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pp. 031101
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2008 ◽
Vol 254
(9)
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pp. 2615-2620
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2006 ◽
Vol 201
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pp. 2547-2552
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2016 ◽
Vol 79
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pp. 90-96
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