Research on Particle Concentration Detection System Based on Laser Scattering Method

2021 ◽  
Author(s):  
Hu Cheng ◽  
Jianxiang Liu ◽  
Zhipeng Zhao ◽  
Renpeng Xing ◽  
Yunuan Wang ◽  
...  
Keyword(s):  
Particle Concentration ◽  
Detection System ◽  
Scattering Method ◽  
Laser Scattering

Inspection of micro-cracks on solderball surface using a laser scattering method

2000 ◽  
Vol 183 (1-4) ◽  
pp. 19-27 ◽  
Author(s):  
C. Quan ◽  
S.H. Wang ◽  
C.J. Tay ◽  
H.M. Shang ◽  
K.C. Chan
Keyword(s):  
Scattering Method ◽  
Laser Scattering ◽  
Micro Cracks

scholarly journals Observation of Oxide-film Step with Very Small Height on Si Wafer Surface Using a Laser Scattering Method

2006 ◽  
Vol 72 (11) ◽  
pp. 1363-1367
Author(s):  
Haruyuki INOUE ◽  
Toshihiko KATAOKA ◽  
Yoshihiro NAGAO ◽  
Yasushi OSHIKANE ◽  
Motohiro NAKANO ◽  
...  
Keyword(s):  
Oxide Film ◽  
Wafer Surface ◽  
Scattering Method ◽  
Laser Scattering ◽  
Small Height ◽  
Si Wafer

Study on the Optical Properties of PbWO4 Crystal in Material Engineering

2012 ◽  
Vol 583 ◽  
pp. 399-402
Author(s):  
Dong Mei Zhao ◽  
Xue Peng Liu
Keyword(s):  
Optical Properties ◽  
Raman Spectra ◽  
Scattering Method ◽  
Regular Lattice ◽  
Luminescent Center ◽  
Laser Scattering ◽  
Material Engineering ◽  
Luminescent Spectra

On the basis of measuring its Raman spectra in material engineering with four kinds of geometrical configurations laser scattering method is utilized. Compared with other scheelite scintillators crystals， the blue luminescent center is the regular lattice ，green luminescent center is (WO3+F). Finally the crystal’s luminescent spectra is measured

Improved Defect Classification Techniques of a Laser Scattering Detection System for Post CMP Silicon Dioxide Wafers

2007 ◽  
Vol 991 ◽  
Author(s):  
Daniel Mateja ◽  
Toshi Kasai ◽  
Michael Denham ◽  
Haresh Siriwardane
Keyword(s):  
Light Scattering ◽  
Silicon Dioxide ◽  
Laser Light ◽  
Detection System ◽  
Incident Beam ◽  
Experimental Conditions ◽  
Laser Scattering ◽  
Scattering Geometry ◽  
Scattering Technique ◽  
Light Scattering Technique

ABSTRACTA laser light scattering technique was used for the identification of defects on silicon dioxide (SiO2) wafers polished with a tungsten CMP slurry. Defects were then classified as scratches and particles using scanning electron microscopy (SEM). The effects of the incident beam illumination and scattering geometry on the defect detection are examined. Appropriate experimental conditions for selective detection of scratches and particles are discussed in conjunction with the estimated defect count and fractional ratio for specific defect types and sizes. The findings are qualitatively consistent with predicted light scattering distributions simulated from silicon bare substrates.

scholarly journals Effects of Surfactants and Electrolytes on Chemical Oscillation at a Water/Nitrobenzene Interface Investigated by Quasi-elastic Laser Scattering Method

2013 ◽  
Vol 29 (9) ◽  
pp. 911-917 ◽  
Author(s):  
Taro TOYOTA ◽  
Koyo UCHIYAMA ◽  
Takahiro KIMURA ◽  
Tomonori NOMOTO ◽  
Masanori FUJINAMI
Keyword(s):  
Scattering Method ◽  
Laser Scattering ◽  
Chemical Oscillation
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