Irregular Surface and Porous Structure of SiO2 Films Deposited at Low Temperature and Low Pressure
1998 ◽
Vol 145
(7)
◽
pp. 2569-2572
◽
1988 ◽
Vol 46
◽
pp. 434-435
Keyword(s):
1987 ◽
Vol 48
(C6)
◽
pp. C6-487-C6-492
Keyword(s):
2001 ◽
Vol 231
(1-2)
◽
pp. 242-247
◽
Keyword(s):
2006 ◽
Vol 39
(8)
◽
pp. 1606-1618
◽
1998 ◽
Vol 10
(2)
◽
pp. 197-199
◽
Keyword(s):