Silicon Surface Barrier Modification by Low‐Energy Nitrogen Ion Implantation
1987 ◽
Vol 134
(6)
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pp. 1494-1499
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1999 ◽
Vol 17
(2)
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pp. 411-420
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Keyword(s):
1996 ◽
Vol 83
(1-3)
◽
pp. 269-274
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Keyword(s):
Keyword(s):
2005 ◽
Vol 7
(6)
◽
pp. 3176-3180
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Keyword(s):
Keyword(s):
2018 ◽
Vol 14
(4)
◽
pp. 488-498
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1995 ◽
Vol 103
(4)
◽
pp. 533-536
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Keyword(s):
1996 ◽
Vol 83
(1-3)
◽
pp. 257-262
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Keyword(s):