Air-Gap Fabrication Using a Sacrificial Polymeric Thin Film Synthesized via Initiated Chemical Vapor Deposition
2006 ◽
Vol 153
(4)
◽
pp. C223
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2016 ◽
Vol 34
(3)
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pp. 892-897
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2020 ◽
Vol 110
◽
pp. 110623
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2020 ◽
Vol 122
◽
pp. 109360
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2018 ◽
Vol 26
(13)
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pp. 1257-1264
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2008 ◽
Vol 155
(4)
◽
pp. G78
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2014 ◽
Vol 131
(24)
◽
pp. n/a-n/a
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