Investigation of Electrolytic Condition on Abrasive-Free Electrochemical Mechanical Polishing of 4H-SiC Using Ce Thin Film
2020 ◽
Vol 9
(3)
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pp. 034002
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2016 ◽
Vol 24
(2)
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pp. 343-349
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pp. 235
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Vol 314-316
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pp. 1846-1850
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2019 ◽
Vol 144
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pp. 103431
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2008 ◽
Vol 155
(7)
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pp. H520
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Keyword(s):
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Vol 54
(27)
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pp. 6808-6815
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Vol 271
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pp. 666-676
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Vol 2
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pp. 140-147
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