Bath Stability Monitoring for Electroless Cu Seed Formation in High Aspect Ratio TSV

2015 ◽

Cited By ~ 4

Author(s):

Takashi Tanaka ◽

Mitsuaki Iwashita ◽

Takayuki Toshima ◽

Keiichi Fujita ◽

James Chen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Seed Formation

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Highly conformal and adhesive electroless barrier and Cu seed formation using nanoparticle catalyst for realizing a high aspect ratio cu-filled TSV

2013 IEEE International 3D Systems Integration Conference (3DIC) ◽

10.1109/3dic.2013.6702392 ◽

2013 ◽

Author(s):

S. Nishizawa ◽

R. Arima ◽

T. Shimizu ◽

S. Shingubara ◽

F. Inoue

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Seed Formation ◽

Nanoparticle Catalyst

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Highly adhesive electroless barrier/Cu-seed formation for high aspect ratio through-Si vias

Microelectronic Engineering ◽

10.1016/j.mee.2013.01.009 ◽

2013 ◽

Vol 106 ◽

pp. 164-167 ◽

Cited By ~ 14

Author(s):

Fumihiro Inoue ◽

Tomohiro Shimizu ◽

Hiroshi Miyake ◽

Ryohei Arima ◽

Toshihiko Ito ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Seed Formation

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FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Автометрия ◽

10.15372/aut20180202 ◽

2018 ◽

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

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Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

Прикладная механика и техническая физика ◽

10.15372/pmtf20180414 ◽

2018 ◽

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Cooling Channel

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HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

10.1615/ihtc16.cov.022710 ◽

2018 ◽

Author(s):

Viktor S. Naumkin ◽

O.V. Vitovsky ◽

Maksim S. Makarov ◽

V. E. Nakoryakov

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

Prandtl Number ◽

Heat Carrier ◽

High Aspect Ratio ◽

Flat Channel ◽

Carrier Flow

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HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

Proceeding of International Heat Transfer Conference 8 ◽

10.1615/ihtc8.1470 ◽

1986 ◽

Cited By ~ 4

Author(s):

G. D. Steuber ◽

D. E. Metzger

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Pressure Loss ◽

Pin Fin ◽

Partial Length ◽

Pin Fin Arrays

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High quality and high aspect ratio processing of multilayer structures with dissimilar material properties by UV laser microjet

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5118615 ◽

2016 ◽

Author(s):

Jérémie Diboine ◽

Pierre Leroux ◽

Helgi Diehl ◽

Bernold Richerzhagen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Material Properties ◽

Dissimilar Material ◽

Multilayer Structures ◽

Uv Laser ◽

High Quality

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Experimental and theoretical study of gust response for high-aspect-ratio wing

AIAA Journal ◽

10.2514/3.15078 ◽

2002 ◽

Vol 40 ◽

pp. 419-429 ◽

Cited By ~ 2

Author(s):

D. Tang ◽

E. H. Dowell

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Theoretical Study ◽

Gust Response

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Use of High Aspect Ratio Kaolin as a Tool to Control the Strength and Stiffness Properties of Coated Papers

JAPAN TAPPI JOURNAL ◽

10.2524/jtappij.62.694 ◽

2008 ◽

Vol 62 (6) ◽

pp. 694-699

Author(s):

John C. Husband

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Coated Papers ◽

Stiffness Properties ◽

Strength And Stiffness

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Bath Stability Monitoring for Electroless Cu Seed Formation in High Aspect Ratio TSV

Electro-less barrier/seed formation in high aspect ratio via

Highly conformal and adhesive electroless barrier and Cu seed formation using nanoparticle catalyst for realizing a high aspect ratio cu-filled TSV

Highly adhesive electroless barrier/Cu-seed formation for high aspect ratio through-Si vias

FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

High quality and high aspect ratio processing of multilayer structures with dissimilar material properties by UV laser microjet

Experimental and theoretical study of gust response for high-aspect-ratio wing

Use of High Aspect Ratio Kaolin as a Tool to Control the Strength and Stiffness Properties of Coated Papers

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