Two techniques of spray pyrolysis, namely, electrostatic and pneumatic spray deposition, were used to deposit samaria-doped ceria (SDC) electrolyte and lanthanum strontium cobalt ferrite (LSCF) cathode on cermet or metal supported anodes for solid oxide fuel cells (SOFCs) operated at reduced temperature. The deposition processes, the properties of the deposited films, and the electrochemical performances of the fabricated cells are reported in this paper. The deposited SDC electrolytes were dense and gas-tight, and had good adhesion to the underlying anodes. The deposited LSCF cathode had a preferred morphology to facilitate the transport of oxygen gas and effective contact with the electrolyte. Button cell testing indicated that the SOFCs with electrolyte or cathode deposited by spray pyrolysis had good electrochemical performance. This study demonstrated that spray pyrolysis is a cost-effective process for fabricating thin film SOFCs, especially metal supported SOFCs.