Probing Interactions at the Polymeric Filtration Media/ CMP Slurry Interface Using Dynamic Electrochemical Quartz Crystal Nanobalance (EQCN) and Atomic Force Microscopy (AFM)

2001 ◽  
Vol 385 (1) ◽  
pp. 78-87 ◽  
Author(s):  
John B. Schenkman ◽  
Ingela Jansson ◽  
Yuri Lvov ◽  
James F. Rusling ◽  
Salah Boussaad ◽  
...  

ChemPhysChem ◽  
2014 ◽  
Vol 15 (17) ◽  
pp. 3753-3760 ◽  
Author(s):  
Charles Esnault ◽  
Axelle Renodon-Cornière ◽  
Masayuki Takahashi ◽  
Nathalie Casse ◽  
Nicolas Delorme ◽  
...  

2014 ◽  
Vol 627 ◽  
pp. 35-39
Author(s):  
Jen Ching Huang ◽  
Ho Chang ◽  
Yong Chin You ◽  
Hui Ti Ling

This study focused on the ultrasonic nanomachining by atomic force microscopy (AFM) to understand the phenomena of the ultrasonic nanomachining. The workpiece is an Au/Ti thin film and coated on the quartz crystal resonator (QCR). The ultrasound vibration of workpiece is carried out by used the Quartz crystal microbalance (QCM). And a normal force measurement model was built by force curve measurements in ultrasound vibration environment. The influence of different experimental parameters can be studied such as normal force and repeat number on the cutting depth and chip stacking. After the experiments, it can be found that the ultrasonic nanomachining by AFM is possessed great influence on the cutting depth.


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