Single Particle Inductively Coupled Plasma Mass Spectrometry Study of Ceria Nanoparticle Size Distribution from 300mm Wafer Oxide CMP with Microreplicated Pads

2021 ◽  
Vol MA2021-01 (20) ◽  
pp. 831-831
Author(s):  
Lawrence Zazzera ◽  
Qilin Chan ◽  
Jaimie Stomberg ◽  
Alex Simpson ◽  
Chris Loesch ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Size Distribution ◽  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Nanoparticle Size ◽  
Nanoparticle Size Distribution ◽  
Inductively Coupled ◽  
Mass Spectrometry Study ◽  
Plasma Mass Spectrometry

Methods to increase sample transport efficiency in single particle inductively coupled plasma mass spectrometry when analyzing nanoparticles

2020 ◽  
Vol 35 (10) ◽  
pp. 2165-2170
Author(s):  
Andrew Williams ◽  
Ahmed Al Hejami ◽  
Diane Beauchemin
Keyword(s):  
Mass Spectrometry ◽  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Sample Introduction ◽  
Infrared Heating ◽  
Nanoparticle Size ◽  
Transport Efficiency ◽  
Inductively Coupled ◽  
Sample Introduction System ◽  
Plasma Mass Spectrometry

Infrared heating of the sample introduction system increased the transport efficiency, thereby improving the precision of nanoparticle size measurements.

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