Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

This paper presents the fabrication of Si3N4-based artificial basilar membrane (ABM) with ZnO nanopillar array. Structure of ABMs is composed of the logarithmically varying membrane fabricated by MEMS process and piezonanopillar array grown on the Si3N4-based membrane by hydrothermal method. We fabricate the bottom substrate containing Si3N4-based membrane for inducing the resonant motions from the sound wave and the top substrates of electrodes for acquiring electric signals. In addition, the bonding process of the top and bottom substrate is performed to build ABM device. Depending on sound wave input of the specific frequency, specific location of the ABM produces a resonant behavior. Then a local deformation of the piezonanopillar array produces an electric signal between top and bottom electrode. As experimental results of the fabricated ABM, the measured resonant frequencies are 2.34 kHz, 3.97 kHz, and 8.80 kHz and the produced electrical voltages on each resonant frequency are 794 nV, 398 nV, and 89 nV. Thus, this fabricated ABM device shows the possibility of being a biomimetic acoustic device.

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An articulated predictive model for fluid-free artificial basilar membrane as broadband frequency sensor

Mechanical Systems and Signal Processing ◽

10.1016/j.ymssp.2017.07.026 ◽

2018 ◽

Vol 100 ◽

pp. 766-781 ◽

Cited By ~ 1

Author(s):

Riaz Ahmed ◽

Sourav Banerjee

Keyword(s):

Predictive Model ◽

Basilar Membrane ◽

Frequency Sensor ◽

Artificial Basilar Membrane ◽

Broadband Frequency

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Piezoelectric ALN cantilever array on a SU-8 substrate for flexible artificial basilar membrane

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2017.7863631 ◽

2017 ◽

Cited By ~ 1

Author(s):

Jongmoon Jang ◽

Jeong Hun Jang ◽

Hongsoo Choi

Keyword(s):

Basilar Membrane ◽

Cantilever Array ◽

Artificial Basilar Membrane

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Study on Electric-Magnetic-Acoustic Signal Regularity and Its Correlation during Rock Shear Failure

Advances in Materials Science and Engineering ◽

10.1155/2019/4687607 ◽

2019 ◽

Vol 2019 ◽

pp. 1-12

Author(s):

Huilin Jia ◽

Yue Niu ◽

Xiaofei Liu ◽

Enyuan Wang

Keyword(s):

Acoustic Signal ◽

Damage Evolution ◽

Shear Failure ◽

Tracking System ◽

Correlation Coefficients ◽

Coupling Model ◽

Electric Signal ◽

Rock Materials ◽

Coal Rock ◽

Electric Signals

http://mts.hindawi.com/update/) in our Manuscript Tracking System and after you have logged in click on the ORCID link at the top of the page. This link will take you to the ORCID website where you will be able to create an account for yourself. Once you have done so, your new ORCID will be saved in our Manuscript Tracking System automatically."?>During mining activities, the deformation and damage of coal rock materials might result in coal rock dynamic disasters, such as rock burst. It leads to serious casualties and property losses. Generally, the occurrence of dynamic failure of coal and rock are caused by shear failure of coal seam. Geophysics signals are generated and related to damage evolution in this loading process. In this paper, sandstone samples were subjected to shear failure laboratory experiments, and the electric-magnetic-acoustic signal regularity was measured and analyzed comparatively. The results indicated magnetic signals were more correlated with stress and acoustic emission (AE) signals, while the amplitude of electric signal fluctuation was larger when main failure occurred. With the increase of sample size and shear strength, the strength of electric-magnetic-acoustic signals increased. The correlation coefficients between the magnetic signal and stress as well as AE energy were superior to those of electric signals. The coupling model between AE and electric signals was established, which shows good statistical correlation. This study lays the foundations for further interpreting the generation mechanism of the electric signal. It provides a new method to indicate the damage evolution of coal rock materials.

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