scholarly journals Performance of compliant mechanisms applied to a modified shape accelerometer of single and double layer

2019 ◽  
Vol 9 (6) ◽  
pp. 4675
Author(s):  
Margarita Tecpoyotl-Torres ◽  
Ramon Cabello-Ruiz ◽  
Pedro Vargas-Chable ◽  
Jose Gerardo Vera-Dimas ◽  
Alejandra Ocampo-Diaz
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Compliant Mechanisms ◽  
High Sensitivity ◽  
The Finite Element Method ◽  
Capacitive Accelerometer ◽  
Displacement Sensitivity ◽  
Soi Technology ◽  
Plane Mode ◽  
Operation Frequency

<span>Accelerometers are widely used in several mechanisms of high sensitivity. They are employed for example in tilt-control in spacecraft, inertial navigation, oil exploration, seismic monitoring, etc. In order to improve the sensitivity of the measurements, implementation of Displacement-amplifying Compliant Mechanisms (DaCMs) in a capacitive accelerometer have been reported in the literature. In this paper, a system composed of two elements; capacitive accelerometer with extended beams (CAEB) and a DaCM geometry, of single and souble layer, are analysed. Three materials were considered, in the case, for the second layer. The DaCM implementation improves the operation frequency and displacement sensitivity, under different proportions, at the same time. Furthermore, three sweeps were performed: a range of thickness from 25 µm up to 30 µm (to determine the appropriate silicon mass value, using SOI technology), a range of second layer thickness (to choose the more appropriate material and its thickness) and a range of gravity values (to determine the maximum normal stress in the beams, which defines the superior value of the g operation range). The in-plane mode (y-axis) was considered in all analysed cases. This characterization was developed using the Finite Element Method. Structural and modal analysis responses were under study.</span>

scholarly journals Displacement mechanical amplifiers designed on poly-silicon

2019 ◽  
Vol 9 (2) ◽  
pp. 894
Author(s):  
Ramon Cabello-Ruiz ◽  
Margarita Tecpoyotl-Torres ◽  
Alfonso Torres-Jacome ◽  
Gerardo Vera-Dimas ◽  
Svetlana Koshevaya ◽  
...  
Keyword(s):  
Compliant Mechanisms ◽  
Capacitive Accelerometer ◽  
Poly Silicon ◽  
Displacement Sensitivity ◽  
Plane Mode ◽  
Operation Frequency ◽  
Ansys Workbench

Using Poly-Silicon, the implementation of novel Displacement-amplifying Compliant Mechanisms (DaCM), in two geometries of accelerometers, allows for remarkable improvements in their operation frequency and displacement sensitivity, with different proportions. Similar DaCM´s geometries were previously implemented by us with Silicon. In all mentioned cases, the geometries of DaCM´s are adjusted in order to use them with Conventional Capacitive Accelerometer (CCA) and Capacitive Accelerometer with Extended Beams (CAEB), which operate in-plane mode, (y-axis). It should be noted that CAEB shows improvements (95.33%) in displacement sensitivity compared to ACC. Simulations results, carried out using Ansys Workbench software, validate the system’s performance designed with Poly-Silicon. Finally, a comparison with the similar systems, previously designed with Silicon, is also carried out.

Physical Level Simulation of PolyMUMPs Based Monolithic Tri-Axis MEMS Capacitive Accelerometer Using FEM Technique

2011 ◽  
Vol 403-408 ◽  
pp. 4625-4632
Author(s):  
M.S. Khan ◽  
A. Iqbal ◽  
S.A. Bazaz ◽  
M. Abid
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Excellent Agreement ◽  
High Sensitivity ◽  
Solid Model ◽  
Finite Element Models ◽  
Capacitive Accelerometer ◽  
Physical Level ◽  
3D Layout ◽  
2D Model

In this paper, we present the design verification of PolyMUMPs based monolithic tri-axis MEMS capacitive accelerometer. The physical level simulation has been done using the analyzer module of Coventorware to verify the performance of the three-axis accelerometer using Finite Element Method (FEM) and compared with the optimized results obtained in ANSYS and in MATLAB. The 2D model is created in the designer module of Coventorware. The 3D layout is generated in the preprocessor module and mesh is created on solid model. Proposed three axis accelerometer has three individual single axis accelerometers, integrated on a single substrate uniformly centered on single axis. Low mechanical noise, high sensitivity and sense capacitance have been measured for all axes individually and presented. The results obtained from both the analytical and finite element models are found to be in excellent agreement.

scholarly journals A Novel Displacement-amplifying Compliant Mechanism Implemented on a Modified Capacitive Accelerometer

2017 ◽  
Vol 7 (4) ◽  
pp. 1858 ◽  
Author(s):  
Ramon Cabello-Ruiz ◽  
Margarita Tecpoyotl-Torres ◽  
Alfonso Torres-Jacome ◽  
Volodymyr Grimalsky ◽  
Jose Gerardo Vera-Dimas ◽  
...  
Keyword(s):  
Compliant Mechanism ◽  
Operating Frequency ◽  
Oil Exploration ◽  
Capacitive Accelerometer ◽  
Matlab Code ◽  
Displacement Sensitivity ◽  
Frequency Relationship ◽  
Parameter Values ◽  
Plane Mode ◽  
Operation Frequency

The micro-accelerometers are devices used to measure acceleration. They are implemented in applications such as tilt-control in spacecraft, inertial navigation, oil exploration, etc. These applications require high operating frequency and displacement sensitivity. But getting both high parameter values at the same time is difficult, because there are physical relationships, for each one, where the mass is involved. When the mass is reduced, the operating frequency is high, but the displacement sensitivity decreases and vice versa. The implementation of Displacement-amplifying Compliant Mechanism (DaCM) supports to this dependence decreases. In this paper the displacement sensitivity and operation frequency of a Conventional Capacitive Accelerometer are shown (CCA). A Capacitive Accelerometer with Extended Beams (CAEB) is also presented, which improves displacement sensitivity compared with CCA, and finally the implementation of DACM´s in the aforementioned devices was also carried out. All analyzed cases were developed considering the in-plane mode. The Matlab code used to calculate displacement sensitivity and operating frequency relationship is given in Appendix A.

Simulation of tuning graphene plasmonic behaviors by ferroelectric domains for self-driven infrared photodetector applications

Nanoscale ◽  
2019 ◽  
Vol 11 (43) ◽  
pp. 20868-20875 ◽  
Author(s):  
Junxiong Guo ◽  
Yu Liu ◽  
Yuan Lin ◽  
Yu Tian ◽  
Jinxing Zhang ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Interfacial Effect ◽  
Infrared Photodetector ◽  
The Finite Element Method ◽  
Ferroelectric Domains ◽  
Element Method

We propose a graphene plasmonic infrared photodetector tuned by ferroelectric domains and investigate the interfacial effect using the finite element method.

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