Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters
2010 ◽
Vol 7
(10)
◽
pp. 2165-2170
◽
2008 ◽
Vol 2008.21
(0)
◽
pp. 426-427
2009 ◽
Vol 76-78
◽
pp. 82-87
2002 ◽
Vol 307-311
◽
pp. 1007-1010
◽