Novel Fabrication of Lightly Doped-Drain for Suppressing the Leakage Current in Polycrystalline Silicon Thin-Film Transistor

2017 ◽  
Vol 17 (5) ◽  
pp. 3465-3468
Author(s):  
Hyung Yoon Kim ◽  
Ki Hwan Seok ◽  
Zohreh Kiaee ◽  
Hee Jae Chae ◽  
Sol Kyu Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Lightly Doped Drain

High-performance polycrystalline silicon thin-film transistor with multiple nanowire channels and lightly doped drain structure

2004 ◽  
Vol 84 (19) ◽  
pp. 3822-3824 ◽  
Author(s):  
Yung-Chun Wu ◽  
Ting-Chang Chang ◽  
Chun-Yen Chang ◽  
Chi-Shen Chen ◽  
Chun-Hao Tu ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thin Film Transistor ◽  
Silicon Thin Film ◽  
Lightly Doped Drain

A Center-Offset Polycrystalline-Silicon Thin-Film Transistor With ${\rm n}^{+}$ Amorphous-Silicon Contacts

2009 ◽  
Vol 30 (1) ◽  
pp. 36-38 ◽  
Author(s):  
J. H. Oh ◽  
D. H. Kang ◽  
W. H. Park ◽  
J. Jang ◽  
Y. J. Chang ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Thin Film Transistor ◽  
Silicon Thin Film
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