Characteristics of Sputter-Deposited Ti–Ni–Cu Shape Memory Alloy Thin Films

2018 ◽  
Vol 10 (7) ◽  
pp. 974-978
Author(s):  
Munkhbayar Baatarsuk ◽  
Hyeon-Woo Joo ◽  
Joo-Hyeon Bae ◽  
Sun-Chul Huh ◽  
Gyu-Bong Cho ◽  
...  
Keyword(s):  
Thin Films ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Sputter Deposited

Characterization of shape-memory alloy thin films made up from sputter-deposited Ni/Ti multilayers

2000 ◽  
Vol 48 (16) ◽  
pp. 4065-4071 ◽  
Author(s):  
T Lehnert ◽  
H Grimmer ◽  
P Böni ◽  
M Horisberger ◽  
R Gotthardt
Keyword(s):  
Thin Films ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Sputter Deposited

Sputter-Deposited Shape-Memory Alloy Thin Films: Properties and Applications

MRS Bulletin ◽  
2002 ◽  
Vol 27 (2) ◽  
pp. 111-114 ◽  
Author(s):  
Akira Ishida ◽  
Valery Martynov
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Microelectromechanical Systems ◽  
Sputter Deposition ◽  
Bulk Materials ◽  
Shape Memory Actuators ◽  
Sputter Deposited ◽  
Memory Characteristics

AbstractShape-memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrates that unique fine microstructures are responsible for the superior shape-memory characteristics observed in thin films as compared with bulk materials. Simultaneously, much effort has been undertaken to develop and fabricate micro devices actuated by SMA thin films. This article reviews the research to date on shape-memory behavior and the mechanical properties of SMA thin films in connection with their peculiar microstructures. Promising applications such as microvalves are demonstrated, along with a focused discussion on process-related problems. All of the results indicate that thin-film shape-memory actuators are ready to contribute to the development of microelectromechanical systems.

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