An improved pattern-based prediction model for a class of industrial processes

Author(s):  
Mushu Wang ◽  
Yanrong Lu ◽  
Weigang Pan

For the problem of simplifying pattern-based modeling procedures, an improved pattern-based modeling method is put forward via pattern classification for a class of complex processes. It is a pure data-driven modeling method using statistical attributes of the processes. At the beginning of the paper, a method of system dynamics description based on pattern moving is introduced. Then, an improved method of pattern-moving-based prediction modeling is put forward, and it simplifies the pattern-moving-based modeling method by integrating an initial model and a classification mapping. It consists of two parts: system pattern construction and pattern classification. And a constructive classification neural network (CCNN) is designed to describe system dynamics by classifying the system pattern, and its generalization is discussed. Finally, simulations using data of an actual production process demonstrate the feasibility of the proposed modeling method, and the effectiveness of the CCNN is verified using comparison experiments.

Author(s):  
Zezhou Zhang ◽  
Qingze Zou

Abstract In this paper, an optimal data-driven modeling-free differential-inversion-based iterative control (OMFDIIC) method is proposed for both high performance and robustness in the presence of random disturbances. Achieving high accuracy and fast convergence is challenging as the system dynamics behaviors vary due to the external uncertainties and the system bandwidth is limited. The aim of the proposed method is to compensate for the dynamics effect without modeling process and achieve both high accuracy and robust convergence, by extending the existed modeling-free differential-inversion-based iterative control (MFDIIC) method through a frequency- and iteration-dependent gain. The convergence of the OMFDIIC method is analyzed with random noise/disturbances considered. The developed method is applied to a wafer stage, and shows a significant improvement in the performance.


Author(s):  
Levy Batista ◽  
Thierry Bastogne ◽  
Franck Atienzar ◽  
Annie Delaunois ◽  
Jean-Pierre Valentin

Author(s):  
Jin Zhang ◽  
Zhaohui Tang ◽  
Yongfang Xie ◽  
Mingxi Ai ◽  
Guoyong Zhang ◽  
...  

2018 ◽  
Vol 8 (5) ◽  
pp. 1289-1296 ◽  
Author(s):  
Arun Bala Subramaniyan ◽  
Rong Pan ◽  
Joseph Kuitche ◽  
GovindaSamy TamizhMani

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