Optimal Data-Driven Modeling-Free Differential-Inversion-Based Iterative Control: A Wafer Stage Example

2020 ◽  
Author(s):  
Zezhou Zhang ◽  
Qingze Zou
Keyword(s):  
System Dynamics ◽  
High Performance ◽  
Random Noise ◽  
High Accuracy ◽  
Data Driven ◽  
Modeling Process ◽  
Random Disturbances ◽  
Noise Disturbances ◽  
Data Driven Modeling ◽  
Iterative Control

Abstract In this paper, an optimal data-driven modeling-free differential-inversion-based iterative control (OMFDIIC) method is proposed for both high performance and robustness in the presence of random disturbances. Achieving high accuracy and fast convergence is challenging as the system dynamics behaviors vary due to the external uncertainties and the system bandwidth is limited. The aim of the proposed method is to compensate for the dynamics effect without modeling process and achieve both high accuracy and robust convergence, by extending the existed modeling-free differential-inversion-based iterative control (MFDIIC) method through a frequency- and iteration-dependent gain. The convergence of the OMFDIIC method is analyzed with random noise/disturbances considered. The developed method is applied to a wafer stage, and shows a significant improvement in the performance.

An improved pattern-based prediction model for a class of industrial processes

2021 ◽  
pp. 014233122110555
Author(s):  
Mushu Wang ◽  
Yanrong Lu ◽  
Weigang Pan
Keyword(s):  
System Dynamics ◽  
Pattern Classification ◽  
Modeling Method ◽  
Data Driven ◽  
Industrial Processes ◽  
Initial Model ◽  
Improved Method ◽  
Complex Processes ◽  
Using Data ◽  
Data Driven Modeling

For the problem of simplifying pattern-based modeling procedures, an improved pattern-based modeling method is put forward via pattern classification for a class of complex processes. It is a pure data-driven modeling method using statistical attributes of the processes. At the beginning of the paper, a method of system dynamics description based on pattern moving is introduced. Then, an improved method of pattern-moving-based prediction modeling is put forward, and it simplifies the pattern-moving-based modeling method by integrating an initial model and a classification mapping. It consists of two parts: system pattern construction and pattern classification. And a constructive classification neural network (CCNN) is designed to describe system dynamics by classifying the system pattern, and its generalization is discussed. Finally, simulations using data of an actual production process demonstrate the feasibility of the proposed modeling method, and the effectiveness of the CCNN is verified using comparison experiments.

scholarly journals Are college campuses superspreaders? A data-driven modeling study

2021 ◽  
pp. 1-11
Author(s):  
Hannah Lu ◽  
Cortney Weintz ◽  
Joseph Pace ◽  
Dhiraj Indana ◽  
Kevin Linka ◽  
...  
Keyword(s):  
College Campuses ◽  
Data Driven ◽  
Data Driven Modeling ◽  
Modeling Study

scholarly journals Data-Driven Intelligent 3D Surface Measurement in Smart Manufacturing: Review and Outlook

Machines ◽  
2021 ◽  
Vol 9 (1) ◽  
pp. 13
Author(s):  
Yuhang Yang ◽  
Zhiqiao Dong ◽  
Yuquan Meng ◽  
Chenhui Shao
Keyword(s):  
High Resolution ◽  
High Performance ◽  
Sampling Design ◽  
Three Dimensional ◽  
Measurement Data ◽  
Data Driven ◽  
Surface Measurement ◽  
Smart Manufacturing ◽  
Future Research ◽  
3D Surface

High-fidelity characterization and effective monitoring of spatial and spatiotemporal processes are crucial for high-performance quality control of many manufacturing processes and systems in the era of smart manufacturing. Although the recent development in measurement technologies has made it possible to acquire high-resolution three-dimensional (3D) surface measurement data, it is generally expensive and time-consuming to use such technologies in real-world production settings. Data-driven approaches that stem from statistics and machine learning can potentially enable intelligent, cost-effective surface measurement and thus allow manufacturers to use high-resolution surface data for better decision-making without introducing substantial production cost induced by data acquisition. Among these methods, spatial and spatiotemporal interpolation techniques can draw inferences about unmeasured locations on a surface using the measurement of other locations, thus decreasing the measurement cost and time. However, interpolation methods are very sensitive to the availability of measurement data, and their performances largely depend on the measurement scheme or the sampling design, i.e., how to allocate measurement efforts. As such, sampling design is considered to be another important field that enables intelligent surface measurement. This paper reviews and summarizes the state-of-the-art research in interpolation and sampling design for surface measurement in varied manufacturing applications. Research gaps and future research directions are also identified and can serve as a fundamental guideline to industrial practitioners and researchers for future studies in these areas.

scholarly journals Gain-Preserving Data-Driven Approximation of the Koopman Operator and Its Application in Robust Controller Design

Mathematics ◽  
2021 ◽  
Vol 9 (9) ◽  
pp. 949
Author(s):  
Keita Hara ◽  
Masaki Inoue
Keyword(s):  
Controller Design ◽  
Internal Model Control ◽  
Feedback Controller ◽  
Data Driven ◽  
Koopman Operator ◽  
Plant System ◽  
Dimensional Approximation ◽  
Model Control ◽  
Data Driven Modeling ◽  
L2 Gain

In this paper, we address the data-driven modeling of a nonlinear dynamical system while incorporating a priori information. The nonlinear system is described using the Koopman operator, which is a linear operator defined on a lifted infinite-dimensional state-space. Assuming that the L2 gain of the system is known, the data-driven finite-dimensional approximation of the operator while preserving information about the gain, namely L2 gain-preserving data-driven modeling, is formulated. Then, its computationally efficient solution method is presented. An application of the modeling method to feedback controller design is also presented. Aiming for robust stabilization using data-driven control under a poor training dataset, we address the following two modeling problems: (1) Forward modeling: the data-driven modeling is applied to the operating data of a plant system to derive the plant model; (2) Backward modeling: L2 gain-preserving data-driven modeling is applied to the same data to derive an inverse model of the plant system. Then, a feedback controller composed of the plant and inverse models is created based on internal model control, and it robustly stabilizes the plant system. A design demonstration of the data-driven controller is provided using a numerical experiment.

Data-Driven Modeling Approach to Predict the Recovery Performance of Low-Salinity Waterfloods

2021 ◽  
Author(s):  
Shams Kalam ◽  
Rizwan Ahmed Khan ◽  
Shahnawaz Khan ◽  
Muhammad Faizan ◽  
Muhammad Amin ◽  
...  
Keyword(s):  
Data Driven ◽  
Low Salinity ◽  
Modeling Approach ◽  
Recovery Performance ◽  
Data Driven Modeling

scholarly journals High accuracy data-driven heliostat calibration and state prediction with pretrained deep neural networks

Solar Energy ◽  
2021 ◽  
Vol 218 ◽  
pp. 48-56
Author(s):  
Max Pargmann ◽  
Daniel Maldonado Quinto ◽  
Peter Schwarzbözl ◽  
Robert Pitz-Paal
Keyword(s):  
Neural Networks ◽  
Deep Neural Networks ◽  
High Accuracy ◽  
Data Driven ◽  
State Prediction ◽  
Accuracy Data
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