scholarly journals Microstructural dielectric elastomer actuator with uniaxial in-plane contraction

2012 ◽  
Vol 24 (3) ◽  
pp. 347-356 ◽  
Author(s):  
Shih-Chieh Lin ◽  
Wen-Pin Shih ◽  
Pen-Zen Chang

A micromachined dielectric elastomer actuator with uniaxial in-plane contraction was proposed. The modeling, fabrication, and testing of the actuator were carried out. When a bias voltage was applied, the resulting electrostatic force compressed the dielectric elastomer that then shrank in area due to its embedded microstructures. The proposed dielectric elastomer actuator consisted of two electrode layers, two flexible layers, and a microstructural layer. The microstructural layer possessed the grating patterns that served as the spacers to define the gap between the top and bottom flexible layers. The grating patterns also determined the direction of the in-plane contraction. When the applied electrostatic force pulled together the bottom and top flexible layers, these two layers bent inwardly and shortened the distance between the spacers. The design of the bending actuation was demonstrated utilizing the asymmetric thickness design of the flexible layers.

2021 ◽  
pp. 112889
Author(s):  
Junxing Meng ◽  
Yu Qiu ◽  
Chengyi Hou ◽  
Qinghong Zhang ◽  
Yaogang Li ◽  
...  

2013 ◽  
Vol 1493 ◽  
pp. 201-206
Author(s):  
Rubana Bahar Priti ◽  
Venkat Bommisetty

ABSTRACTHydrogenated nanocrystalline silicon (nc-Si:H) is a promising absorber material for photovoltaic applications. Nanoscale electrical conductivity and overall electronic quality of this material are significantly affected by film microstructure, specifically the density and dimension of grains and grain-boundaries (GB). Local charge distribution at grains and grain/GB interfaces of nc-Si:H was studied by Electrostatic Force Microscopy (EFM) in constant force mode under illumination of white LED. Bias voltage from -3V to +3V was applied on the tip. Scanning Kelvin Force (KFM) images were taken before and after illumination to study the change in surface photovoltage (SP). EFM and KFM analysis were combined with film topography to draw a correlation between surface morphology and nanoscale charge distribution in this material. After illumination, small blister like structures were observed whose size and density increase with time. Raman spectroscopy confirmed these new structures as nanocrystalline silicon. This change was assumed due to relaxation of strained Si-Si bonds as an effect of photo response. Nanocrystalline grain interiors were at lower potential and amorphous grain boundaries were at higher potential for negative bias; it was opposite for positive bias. Change in polarity in bias voltage reversed the polarity of the potential in grains and GBs indicating the dominance of negative type of defects. Further study with current sensing AFM in dark and illumination with variable bias voltages will be able to identify the type and density of defects in grains and grain/GB interfaces.


Soft Matter ◽  
2017 ◽  
Vol 13 (37) ◽  
pp. 6390-6395 ◽  
Author(s):  
Ye Rim Lee ◽  
Hyungho Kwon ◽  
Do Hoon Lee ◽  
Byung Yang Lee

Electrodes consisting of silver nanowires and carbon nanotubes enable a dielectric elastomer actuator to become highly stretchable and optically transparent.


Author(s):  
Ki Bang Lee ◽  
Albert P. Pisano ◽  
Liwei Lin

A 2μm-thick frequency-tunable microresoantor capable of either increasing or decreasing its resonant frequency by a combination of Joule heating and electrostatic force has been successfully demonstrated for the first time. For the heating voltage increase from 0 to 2V under fixed bias voltage of 40V, the resonant frequency changes from 22.2kHz to 16.2kHz, resulting in the 27% reduction in the resonant frequency. For the bias voltage change from 20V to 40V under the heating voltage of 0V, the resonant frequency increase from 19.0kHz to 23.6kHz, resulting in the 24.2% increase in the resonant frequency. As such, this surface-micromachined microactuator could assist complicated frequency tuning for applications of microsensors and microactuators.


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