A Frequency-Tunable Comb Resonator Using Spring Tension and Compression Effects

Author(s):  
Ki Bang Lee ◽  
Albert P. Pisano ◽  
Liwei Lin

A 2μm-thick frequency-tunable microresoantor capable of either increasing or decreasing its resonant frequency by a combination of Joule heating and electrostatic force has been successfully demonstrated for the first time. For the heating voltage increase from 0 to 2V under fixed bias voltage of 40V, the resonant frequency changes from 22.2kHz to 16.2kHz, resulting in the 27% reduction in the resonant frequency. For the bias voltage change from 20V to 40V under the heating voltage of 0V, the resonant frequency increase from 19.0kHz to 23.6kHz, resulting in the 24.2% increase in the resonant frequency. As such, this surface-micromachined microactuator could assist complicated frequency tuning for applications of microsensors and microactuators.

2010 ◽  
Vol 408 (1) ◽  
pp. 48-54 ◽  
Author(s):  
Kaoru Yamashita ◽  
Kenji Tomiyama ◽  
Keita Yoshikawa ◽  
Minoru Noda ◽  
Masanori Okuyama

Author(s):  
Jiyoung Chang ◽  
Jongbaeg Kim ◽  
Byung-Kwon Min ◽  
Sang Jo Lee ◽  
Liwei Lin

Schemes for in-situ resonant frequency tuning of nano scale vibrating structures using Focused Ion Beam (FIB) sputtering and FIB-Chemical Vapor Deposition (CVD) are presented. This approach introduces precisely controlled permanent increase or decrease of resonant frequencies on processed nano structures, enabling the frequency adjustment when the desired resonant frequency is higher or lower than the actual frequency of the fabricated resonators. The vibration is induced by electrostatic force between resonator and stator using 0~10V AC input and all the processes including fabrication of nanostructure, electrostatic actuation, vibration observation and frequency tuning in either higher or lower direction were successfully conducted in single FIB chamber. The range of the frequency tuned from 600kHz initial resonant frequency is +6kHz with -1.9μm and -65kHz with +1.1μm length change of the nano-resonator respectively. Structural FEM analysis result is compared with the experimental result.


2018 ◽  
Vol 27 (11) ◽  
pp. 114005 ◽  
Author(s):  
Lin Dong ◽  
Michael D Grissom ◽  
Tahzib Safwat ◽  
M G Prasad ◽  
Frank T Fisher

2013 ◽  
Vol 1493 ◽  
pp. 201-206
Author(s):  
Rubana Bahar Priti ◽  
Venkat Bommisetty

ABSTRACTHydrogenated nanocrystalline silicon (nc-Si:H) is a promising absorber material for photovoltaic applications. Nanoscale electrical conductivity and overall electronic quality of this material are significantly affected by film microstructure, specifically the density and dimension of grains and grain-boundaries (GB). Local charge distribution at grains and grain/GB interfaces of nc-Si:H was studied by Electrostatic Force Microscopy (EFM) in constant force mode under illumination of white LED. Bias voltage from -3V to +3V was applied on the tip. Scanning Kelvin Force (KFM) images were taken before and after illumination to study the change in surface photovoltage (SP). EFM and KFM analysis were combined with film topography to draw a correlation between surface morphology and nanoscale charge distribution in this material. After illumination, small blister like structures were observed whose size and density increase with time. Raman spectroscopy confirmed these new structures as nanocrystalline silicon. This change was assumed due to relaxation of strained Si-Si bonds as an effect of photo response. Nanocrystalline grain interiors were at lower potential and amorphous grain boundaries were at higher potential for negative bias; it was opposite for positive bias. Change in polarity in bias voltage reversed the polarity of the potential in grains and GBs indicating the dominance of negative type of defects. Further study with current sensing AFM in dark and illumination with variable bias voltages will be able to identify the type and density of defects in grains and grain/GB interfaces.


2013 ◽  
Vol 136 (1) ◽  
Author(s):  
Longhan Xie ◽  
Ruxu Du

This paper investigates a frequency-tunable nonlinear electromagnetic energy harvester. The electromagnetic harvester mainly consists of permanent magnets supported on the base to provide a magnetic field, and electrical coils suspended by four even-distributed elastic strings to be an oscillating object. When the base provides external excitation, the electrical coils oscillate in the magnetic field to produce electricity. The stretch length of the elastic strings can be tuned to change their stretch ratio by tuning adjustable screws, which can result in a shift of natural frequency of the harvester system. The transverse force of the elastic strings has nonlinear behavior, which broadens the system's frequency response to improve the performance of the energy harvester. Both simulation and experiment show that the above-discussed electromagnetic energy harvester has nonlinear behavior and frequency-tunable ability, which can be used to improve the effectiveness of energy harvesting.


Author(s):  
Fangrong Hu ◽  
Jun Yao ◽  
Chuankai Qiu ◽  
Dajia Wang

In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.


2012 ◽  
Vol 24 (3) ◽  
pp. 347-356 ◽  
Author(s):  
Shih-Chieh Lin ◽  
Wen-Pin Shih ◽  
Pen-Zen Chang

A micromachined dielectric elastomer actuator with uniaxial in-plane contraction was proposed. The modeling, fabrication, and testing of the actuator were carried out. When a bias voltage was applied, the resulting electrostatic force compressed the dielectric elastomer that then shrank in area due to its embedded microstructures. The proposed dielectric elastomer actuator consisted of two electrode layers, two flexible layers, and a microstructural layer. The microstructural layer possessed the grating patterns that served as the spacers to define the gap between the top and bottom flexible layers. The grating patterns also determined the direction of the in-plane contraction. When the applied electrostatic force pulled together the bottom and top flexible layers, these two layers bent inwardly and shortened the distance between the spacers. The design of the bending actuation was demonstrated utilizing the asymmetric thickness design of the flexible layers.


NANO ◽  
2015 ◽  
Vol 10 (03) ◽  
pp. 1550038 ◽  
Author(s):  
Yan Jiang ◽  
Lili Yue ◽  
Boshen Yan ◽  
Xi Liu ◽  
Xiaofei Yang ◽  
...  

We investigated friction on an n-type silicon surface using an atomic force microscope when a bias voltage was applied to the sample. Friction forces on the same track line were measured before and after the bias voltages were applied and it was found that the friction forces in n-type silicon can be tuned reversibly with the bias voltage. The dependence of adhesion forces between the silicon nitride tip and Si sample on the bias voltages approximately follows a parabolic law due to electrostatic force, which results in a significant increase in the friction force at an applied electric field.


Author(s):  
Mohanad H. Ali

<p>Biosensors depend on cantilevers have developed a promising tool for detecting biomedical, optical laser communication and many fields of interactions with high accuracy. We modeled the operation of cantilevers<strong> </strong>with two magnetic and coil using Ansys program. This simulation technique can capably be used to select the appropriate design and dimensions of cantilever with the geometry of system. The primary main of the magnetic design is to improve the geometry of the coil and shape to yield a highly uniform for 3D of optical fiber includes Silica Glass and  Nickel cantilever, two magnets and one coil that apply to force on the cantilever cylinder is using as a cantilever in the designing of this case.In conclusion,resonant frequency(  tuning applying cantilivier presented in the resracher have larger variable range by using 2-magnets with the coil.However,the adjusting of the system and changing the deminsions.Resolutions to this problematic contain tuning the modes of resonant frequency to produce by cantilivier with  2-magnets and coil when the signal  pass from  laser source. Based on these simulations and characterization results, the proposed assembly can be a good applicant for evolving a low price, high material platform for many biological, laser optical fiber, communication, machine learning, biosensors and biomedical applications.</p>


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