Advances in monitoring methods for airborne particles

2004 ◽  
pp. 33-44
Author(s):  
Philip Hopke
Author(s):  
M. Shlepr ◽  
C. M. Vicroy

The microelectronics industry is heavily tasked with minimizing contaminates at all steps of the manufacturing process. Particles are generated by physical and/or chemical fragmentation from a mothersource. The tools and macrovolumes of chemicals used for processing, the environment surrounding the process, and the circuits themselves are all potential particle sources. A first step in eliminating these contaminants is to identify their source. Elemental analysis of the particles often proves useful toward this goal, and energy dispersive spectroscopy (EDS) is a commonly used technique. However, the large variety of source materials and process induced changes in the particles often make it difficult to discern if the particles are from a common source.Ordination is commonly used in ecology to understand community relationships. This technique usespair-wise measures of similarity. Separation of the data set is based on discrimination functions. Theend product is a spatial representation of the data with the distance between points equaling the degree of dissimilarity.


2020 ◽  
Vol 54 (6) ◽  
pp. 410-416
Author(s):  
Joyce M. Hansen ◽  
Scott Weiss ◽  
Terra A. Kremer ◽  
Myrelis Aguilar ◽  
Gerald McDonnell

The COVID-19 pandemic, caused by severe acute respiratory syndrome coronavirus 2, has challenged healthcare providers in maintaining the supply of critical personal protective equipment, including single-use respirators and surgical masks. Single-use respirators and surgical masks can reduce risks from the inhalation of airborne particles and microbial contamination. The recent high-volume demand for single-use respirators and surgical masks has resulted in many healthcare facilities considering processing to address critical shortages. The dry heat process of 80°C (176°F) for two hours (120 min) has been confirmed to be an appropriate method for single-use respirator and surgical mask processing.


2010 ◽  
Author(s):  
Robert Siegrist ◽  
Ryan Oesterreich ◽  
Leanna Woods ◽  
Michele Crimi

2003 ◽  
Vol 2 (4) ◽  
pp. 443-443 ◽  
Author(s):  
Ty P. A. Ferré ◽  
Gerard J. Kluitenberg
Keyword(s):  

2003 ◽  
Vol 2 (4) ◽  
pp. 443
Author(s):  
Ty P. A. Ferré ◽  
Gerard J. Kluitenberg
Keyword(s):  

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