Automatic Fringe Analysis Procedures in Speckle Metrology

2020 ◽  
pp. 427-472
Author(s):  
G. H. Kaufmann
Author(s):  
R.K. Jain ◽  
T. Malik ◽  
T.R. Lundquist ◽  
C.-C. Tsao ◽  
W.J. Walecki

Abstract Novel Fabry Perot [1] fringe analysis techniques for monitoring the etching process with a coaxial photon-ion column [2] in the Credence OptiFIB are reported. Presently the primary application of these techniques in circuit edit is in trenching either from the front side or from the backside of a device. Optical fringes are observed in reflection geometry through the imaging system when the trench floor is thin and semi-transparent. The observed fringes result from optical interference in the etalon formed between the trench floor (Si in the case of backside trenching) and the circuitry layer beyond the trench floor. In-situ real-time thickness measurements and slope correction techniques are proposed that improve endpoint detection and control planarity of the trench floor. For successful through silicon edits, reliable endpoint detection and co-planarity of a local trench is important. Reliable endpoint detection prevents milling through bulk silicon and damaging active circuitry. Uneven trench floor thickness results in premature endpoint detection with sufficient thickness remaining in only part of the trench area. Good co-planarity of the trench floor also minimizes variability in the aspect ratios of the edit holes, hence increasing success rates in circuit edit.


1992 ◽  
Vol 21 (2) ◽  
pp. 31-36 ◽  
Author(s):  
A. G. Khadakkar ◽  
A. P. Thenmozhi ◽  
R. Narayanan

1984 ◽  
Vol 13 (2) ◽  
pp. 53-57
Author(s):  
Chandra Shakher ◽  
G. Venkata Rao
Keyword(s):  

Optik ◽  
2012 ◽  
Vol 123 (9) ◽  
pp. 841-845 ◽  
Author(s):  
Xintian Bian ◽  
Xianyu Su ◽  
Wenjing Chen ◽  
Qican Zhang

2018 ◽  
Vol 20 (8-9) ◽  
pp. 953-966 ◽  
Author(s):  
Madhu Singh ◽  
Mek Srilomsak ◽  
Yujun Wang ◽  
Katsunori Hanamura ◽  
Randy Vander Wal

Development of the regeneration process on diesel particulate filters requires a better understanding of soot oxidation phenomena, especially its relation to soot nanostructure. Nitrogen dioxide (NO2) is known to play an essential role in passive regeneration by oxidizing soot at low temperatures, especially in the presence of oxygen (O2) in the exhaust. However, change in soot nanostructure due to oxidation by NO2–O2 mixtures has not received much attention. This work focuses on nanostructure evolution during passive regeneration of the diesel particulate filter by oxidation of soot at normal exhaust gas temperatures (300°C–400°C). High-resolution transmission electron microscopy of partially oxidized model carbons (R250, M1300, arc-generated soot) and diesel soot under NO2–O2 mixtures is used to investigate physical changes in nanostructure correlating with the material’s behavior during oxidation. Microscopy reveals the changing nanostructure of model carbons during oxidation while fringe analysis of the images points to the differences in the structural metrics of fringe length and tortuosity of the resultant structures. The variation in oxidation rates highlights the inter-dependence of the material’s reactivity with its structure. NO2 preferentially oxidizes edge-site carbon, promotes surface oxidation by altering the particle’s burning mode with increased overall reactivity of NO2+O2 resulting in inhibition of internal burning, typically observed by O2 at exhaust gas temperatures.


1997 ◽  
Vol 36 (32) ◽  
pp. 8391 ◽  
Author(s):  
Mariano Rivera ◽  
Ramon Rodriguez-Vera ◽  
Jose L. Marroquin
Keyword(s):  

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