6AM2-C-6 Low Friction Mechanism of Carbon Nitride Based on Tight-Binding Quantum Chemical Molecular Dynamics and First-Principles Molecular Dynamics Simulations

2013 ◽  
Vol 2013.5 (0) ◽  
pp. 119-120
Author(s):  
Seiichiro Sato ◽  
Yoshihiko Kobayashi ◽  
Shandan Bai ◽  
Yuji Higuchi ◽  
Nobuki Ozawa ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
First Principles ◽  
Quantum Chemical ◽  
Carbon Nitride ◽  
Tight Binding ◽  
Low Friction ◽  
Friction Mechanism ◽  
Dynamics Simulations ◽  
Quantum Chemical Molecular Dynamics

Tight-binding quantum chemical molecular dynamics simulations for the elucidation of chemical reaction dynamics in SiC etching with SF6/O2 plasma

2016 ◽  
Vol 18 (11) ◽  
pp. 7808-7819 ◽  
Author(s):  
Hiroshi Ito ◽  
Takuya Kuwahara ◽  
Kentaro Kawaguchi ◽  
Yuji Higuchi ◽  
Nobuki Ozawa ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Chemical Reaction ◽  
Quantum Chemical ◽  
Tight Binding ◽  
Reaction Dynamics ◽  
Chemical Reaction Dynamics ◽  
Dynamics Simulations ◽  
Quantum Chemical Molecular Dynamics ◽  
O2 Plasma

Simulations based on tight-binding quantum chemical molecular dynamics are performed to elucidate SiC etching mechanisms and to study SiC surface reactions with SF5 radicals and O atoms.

Sign in / Sign up

Export Citation Format

Share Document