Tight-Binding Quantum Chemical Molecular Dynamics Simulations of Mechanisms of SiO2 Etching Processes for CF2 and CF3 Radicals
2014 ◽
Vol 118
(37)
◽
pp. 21580-21588
◽
2013 ◽
Vol 2013.5
(0)
◽
pp. 119-120
2016 ◽
Vol 18
(11)
◽
pp. 7808-7819
◽
2016 ◽
Vol 8
(18)
◽
pp. 11830-11841
◽
2013 ◽
Vol 12
(1)
◽
pp. A3-A13
◽
2013 ◽
Vol 52
(2R)
◽
pp. 026502
◽
1999 ◽
Vol 7
(1)
◽
pp. 43-58
◽