Optoelectronic properties and anisotropic stress of Mo:ZnO thin films deposited on flexible substrates by radio frequency magnetron sputtering

Applied Optics ◽

10.1364/ao.383440 ◽

2020 ◽

Vol 59 (5) ◽

pp. 1454 ◽

Author(s):

Hsi-Chao Chen ◽

Guan-Ting Peng ◽

Tan-Fu Liu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering ◽

Anisotropic Stress

Download Full-text

Biaxial stress and optoelectronic properties of Al-doped ZnO thin films deposited on flexible substrates by radio frequency magnetron sputtering

Applied Optics ◽

10.1364/ao.56.00c163 ◽

2016 ◽

Vol 56 (4) ◽

pp. C163 ◽

Author(s):

Hsi-Chao Chen ◽

Po-Wei Cheng ◽

Kuo-Ting Huang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Biaxial Stress ◽

Zno Thin Films ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering ◽

Download Full-text

Thermoelectric Properties of Cobalt Antimony Thin Films Deposited on Flexible Substrates by Radio Frequency Magnetron Sputtering

Journal of Electronic Materials ◽

10.1007/s11664-014-3546-y ◽

2014 ◽

Vol 44 (2) ◽

pp. 630-635 ◽

Author(s):

Ping Fan ◽

Yin Zhang ◽

Zhuang-hao Zheng ◽

Wei-fang Fan ◽

Jing-ting Luo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Thermoelectric Properties ◽

Radio Frequency Magnetron ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Structural and optoelectronic properties of Al-doped zinc oxide films deposited on flexible substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.05.017 ◽

2011 ◽

Vol 519 (22) ◽

pp. 7959-7965 ◽

Author(s):

C.H. Tseng ◽

C.H. Huang ◽

H.C. Chang ◽

D.Y. Chen ◽

C.P. Chou ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films ◽

Structural And Optoelectronic Properties

Download Full-text

Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method

Journal of Applied Physics ◽

10.1063/1.370834 ◽

1999 ◽

Vol 86 (2) ◽

pp. 974-980 ◽

Author(s):

Keran Zhang ◽

Furong Zhu ◽

C. H. A. Huan ◽

A. T. S. Wee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Hydrogen Partial Pressure ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Optoelectronic properties of ZnO thin films grown by radio frequency magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-020-04340-4 ◽

2020 ◽

Vol 31 (20) ◽

pp. 17872-17878

Author(s):

Saâd Rahmane ◽

Mohamed Abdou Djouadi

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

Download Full-text

Fabrication of Mg3Sb2 thin films via radio-frequency magnetron sputtering and analysis of the corresponding electrical properties

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-06468-3 ◽

2021 ◽

Author(s):

Jun-ichi Tani ◽

Hiromichi Ishikawa

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.2765 ◽

2001 ◽

Vol 40 (Part 1, No. 4B) ◽

pp. 2765-2768 ◽

Author(s):

Shogo Ishizuka ◽

Shinya Kato ◽

Takahiro Maruyama ◽

Katsuhiro Akimoto

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Nitrogen Doping ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Cu2o Thin Films

Download Full-text

Structures and properties of the Al-doped ZnO thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.03.026 ◽

2011 ◽

Vol 519 (16) ◽

pp. 5577-5581 ◽

Author(s):

Hongyun Yue ◽

Aimin Wu ◽

Yudong Feng ◽

Xueyu Zhang ◽

Tingju Li

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Structures And Properties ◽

Download Full-text

Comment on Lihua Liu et al. “Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering” [Appl. Surf. Sci. 252 (2006) 4185–4189]

Applied Surface Science ◽

10.1016/j.apsusc.2006.10.034 ◽

2007 ◽

Vol 253 (10) ◽

pp. 4814-4815 ◽

Author(s):

V. Linss

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Carbon Nitride ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Boron Carbon Nitride ◽

Download Full-text