Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method

Radio Frequency Magnetron Sputtering

Highly Transparent Conducting Indium Tin Oxide Thin Films Prepared by Radio Frequency Magnetron Sputtering and Thermal Annealing

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.16242 ◽

2019 ◽

Vol 19 (3) ◽

pp. 1455-1462 ◽

Cited By ~ 10

Author(s):

Bhaskar Parida ◽

Youngun Gil ◽

Hyunsoo Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Transparent Conducting

(400)-Oriented indium tin oxide thin films with high mobility and figure of merit prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.137972 ◽

2020 ◽

Vol 704 ◽

pp. 137972 ◽

Cited By ~ 1

Author(s):

Ajinkya Bhorde ◽

Ashok Jadhavar ◽

Ravindra Waykar ◽

Shruthi Nair ◽

Haribhau Borate ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Figure Of Merit ◽

High Mobility ◽

Oxide Thin Films

Structural and optical properties of BaxSr1−xTiO3 thin films on indium tin oxide/quartz substrates prepared by radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2202094 ◽

2006 ◽

Vol 99 (11) ◽

pp. 114904 ◽

Cited By ~ 24

Author(s):

W. J. Leng ◽

C. R. Yang ◽

J. H. Zhang ◽

H. W. Chen ◽

H. Ji ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Structural And Optical Properties ◽

Quartz Substrates

Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors

Sensors and Actuators ◽

10.1016/0250-6874(88)87013-6 ◽

1988 ◽

Vol 15 (3) ◽

pp. 235-242 ◽

Cited By ~ 56

Author(s):

G. Sberveglieri ◽

S. Groppelli ◽

G. Coccoli

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Gas Sensors ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Ito Thin Films

Optoelectronic properties and anisotropic stress of Mo:ZnO thin films deposited on flexible substrates by radio frequency magnetron sputtering

Applied Optics ◽

10.1364/ao.383440 ◽

2020 ◽

Vol 59 (5) ◽

pp. 1454 ◽

Cited By ~ 2

Author(s):

Hsi-Chao Chen ◽

Guan-Ting Peng ◽

Tan-Fu Liu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Flexible Substrates ◽

Anisotropic Stress

An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering

Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy ◽

10.1016/j.saa.2014.10.029 ◽

2015 ◽

Vol 136 ◽

pp. 1409-1417 ◽

Cited By ~ 8

Author(s):

Mohsen Daouahi ◽

Mourad Omri ◽

Abdul Ghani Yousseph Kerm ◽

Faisal Abdulaziz Al-Agel ◽

Najeh Rekik

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Nanocrystalline Structure ◽

High Partial Pressure

Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2014.03.020 ◽

2014 ◽

Vol 14 (6) ◽

pp. 850-855 ◽

Cited By ~ 17

Author(s):

R. Pandey ◽

S.H. Cho ◽

D.K. Hwang ◽

W.K. Choi

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Oxide Thin Films ◽

Structural And Electrical Properties ◽

Zinc Tin Oxide

Vanadium oxide thin films deposited on indium tin oxide glass by radio-frequency magnetron sputtering

Chinese Physics ◽

10.1088/1009-1963/11/7/317 ◽

2002 ◽

Vol 11 (7) ◽

pp. 737-740 ◽

Cited By ~ 11

Author(s):

Wang Xue-Jin ◽

Fei Yun-Jie ◽

Xiong Yan-Yun ◽

Nie Yu-Xin ◽

Feng Ke-An ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Vanadium Oxide ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Glass ◽

Vanadium Oxide Thin Films ◽

Indium Tin Oxide Glass

A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1584038 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1069-1072 ◽

Cited By ~ 9

Author(s):

Deuk Yeon Lee ◽

Se-Jong Lee ◽

Kie Moon Song ◽

Hong Koo Baik

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

International Photonics and Optoelectronics Meetings (POEM) ◽

10.1364/aoee.2013.asa3a.24 ◽

2013 ◽

Author(s):

Ge Wang ◽

Lei Zhao ◽

Hongwei Diao ◽

Jingwei Chen ◽

Baojun Yan ◽

...

Keyword(s):

Optical Properties ◽

Oxide Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thickness Dependence ◽

Electrical And Optical Properties