Wide-view and accurate deformation measurement at microscales by phase extraction of scanning moiré pattern with a spatial phase-shifting technique

2021 ◽  
Vol 60 (6) ◽  
pp. 1637
Author(s):  
Qinghua Wang ◽  
Shien Ri ◽  
Peng Xia
Sensors ◽  
2021 ◽  
Vol 21 (8) ◽  
pp. 2837
Author(s):  
Hyo Mi Park ◽  
Ki-Nam Joo

In this investigation, we propose a motionless polarizing structured illumination microscopy as an axially sectioning and reflective-type device to measure the 3D surface profiles of specimens. Based on the spatial phase-shifting technique to obtain the visibility of the illumination pattern. Instead of using a grid, a Wollaston prism is used to generate the light pattern by the stable interference of two beams. As the polarization states of two beams are orthogonal with each other, a polarization pixelated CMOS camera can simultaneously obtain four phase-shifted patterns with the beams after passing through a quarter wave plate based on the spatial phase-shifting technique with polarization. In addition, a focus tunable lens is used to eliminate a mechanical moving part for the axial scanning of the specimen. In the experimental result, a step height sample and a concave mirror were measured with 0.05 µm and 0.2 mm repeatabilities of step height and the radius of curvature, respectively.


1998 ◽  
Author(s):  
Shaoming Zhu ◽  
Xiang Peng ◽  
Zonghua Zhang ◽  
Xiaotang Hu

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