Effect of high-energy electron-beam irradiation on the optical properties of ion-beam-sputtered silicon oxynitride thin films
Keyword(s):
Ion Beam
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Keyword(s):
2010 ◽
Vol 56
(1(2))
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pp. 356-361
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Keyword(s):
2010 ◽
Vol 496
(1-2)
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pp. 543-547
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Keyword(s):
2011 ◽
Vol 58
(3(1))
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pp. 555-559
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Keyword(s):
2003 ◽
Vol 9
(6)
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pp. 549-553
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Keyword(s):
2000 ◽
Vol 31
(11)
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pp. 2849-2855
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2013 ◽
Vol 61
(22)
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pp. 5215-5219
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Keyword(s):
2004 ◽
Vol 179
(2-3)
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pp. 340-348
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2001 ◽
Vol 32
(10)
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pp. 2499-2508
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