Automated determination of best focus and minimization of optical path difference in Linnik white light interferometry
Keyword(s):
Keyword(s):
1990 ◽
Vol 1
(6)
◽
pp. 500-504
◽
2010 ◽
Vol 447-448
◽
pp. 599-603
Keyword(s):
Keyword(s):
Keyword(s):