Design, fabrication and characterization of suspended silicon nitride photonic crystal nanocavities

2015 ◽  
Author(s):  
Loukas Athanasekos ◽  
Aristi Christofi ◽  
Nikolaos Papanikolaou
Keyword(s):  
Photonic Crystal ◽  
Silicon Nitride ◽  
Fabrication And Characterization

scholarly journals Progress in growth, fabrication, and characterization of semiconductor photonic crystal nanocavities [Phys. Status Solidi B 248 , No. 4, 892-896 (2011)]

2012 ◽  
Vol 249 (7) ◽  
pp. 1477-1477
Author(s):  
B. C. Richards ◽  
J. Hendrickson ◽  
J. D. Olitzky ◽  
R. Gibson ◽  
M. Gehl ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Fabrication And Characterization

Fabrication and characterization of silicon nitride-based inert matrix fuels sintered with magnesium silicates

2011 ◽  
Vol 53 (7) ◽  
pp. 1078-1081
Author(s):  
Toshiyuki Usuki ◽  
Katsumi Yoshida ◽  
Toyohiko Yano ◽  
Shuhei Miwa ◽  
Masahiko Osaka
Keyword(s):  
Silicon Nitride ◽  
Inert Matrix ◽  
Magnesium Silicates ◽  
Fabrication And Characterization ◽  
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Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

2008 ◽  
Author(s):  
Jee Soo Chang ◽  
Myung-Ki Kim ◽  
Yong-Hee Lee ◽  
Jung H. Shin ◽  
Gun Yong Sung
Keyword(s):  
Silicon Nitride ◽  
Doped Silicon ◽  
Fabrication And Characterization ◽  
Er Doped

scholarly journals Fabrication and characterization of PECVD silicon nitride for RF MEMS applications

2012 ◽  
Vol 19 (1) ◽  
pp. 131-136 ◽  
Author(s):  
H. U. Rahman ◽  
B. C. Johnson ◽  
J. C. Mccallum ◽  
E. Gauja ◽  
R. Ramer
Keyword(s):  
Silicon Nitride ◽  
Rf Mems ◽  
Fabrication And Characterization
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