Intrinsic birefringence in 193nm and 157nm lithography crystalline optics
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1971 ◽
Vol 51
(3)
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pp. 763-771
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2012 ◽
Vol 535-537
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pp. 1923-1926
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2004 ◽
Vol 42
(12)
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pp. 2354-2366
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1965 ◽
Vol 5
(4)
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pp. 531-552
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