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Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation
Optics Letters
◽
10.1364/ol.31.002517
◽
2006
◽
Vol 31
(17)
◽
pp. 2517
◽
Cited By ~ 7
Author(s):
Aghapi G. Mordovanakis
◽
Kai-Chung Hou
◽
Yu-Chung Chang
◽
Ming-Yuan Cheng
◽
John Nees
◽
...
Keyword(s):
Fiber Laser
◽
Uv Light
◽
Plasma Source
◽
Laser Produced Plasma
◽
Extreme Uv
◽
Light Generation
Download Full-text
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References
Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source
Optics Letters
◽
10.1364/ol.39.001953
◽
2014
◽
Vol 39
(7)
◽
pp. 1953
◽
Cited By ~ 1
Author(s):
Krzysztof M. Nowak
◽
Takeshi Ohta
◽
Takashi Suganuma
◽
Junichi Fujimoto
◽
Hakaru Mizoguchi
◽
...
Keyword(s):
Planar Waveguide
◽
Plasma Source
◽
Nanosecond Pulse
◽
Uv Laser
◽
Pulse Amplification
◽
Laser Produced Plasma
◽
Extreme Uv
Download Full-text
Extreme UV Light Generation Through Dispersive Wave Trapping in a Tapered Gas-Filled Hollow Fiber
IEEE Photonics Technology Letters
◽
10.1109/lpt.2019.2908953
◽
2019
◽
Vol 31
(10)
◽
pp. 795-798
Author(s):
Md. Selim Habib
◽
Christos Markos
◽
J. E. Antonio-Lopez
◽
Rodrigo Amezcua-Correa
Keyword(s):
Hollow Fiber
◽
Uv Light
◽
Dispersive Wave
◽
Wave Trapping
◽
Extreme Uv
◽
Light Generation
Download Full-text
Development of Laser Produced Plasma Source for Extreme Ultraviolet Lithography
The Review of Laser Engineering
◽
10.2184/lsj.36.684
◽
2008
◽
Vol 36
(11)
◽
pp. 684-689
Author(s):
Akira SUMITANI
Keyword(s):
Extreme Ultraviolet
◽
Plasma Source
◽
Extreme Ultraviolet Lithography
◽
Ultraviolet Lithography
◽
Laser Produced Plasma
Download Full-text
A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source
Journal of X-Ray Science and Technology
◽
10.3233/xst-1992-3402
◽
1992
◽
Vol 3
(4)
◽
pp. 283-299
Author(s):
E. M. Gullikson
◽
J. H. Underwood
◽
P. C. Batson
◽
V. Nikitin
Keyword(s):
Plasma Source
◽
X Ray
◽
Laser Produced Plasma
Download Full-text
High-power UV light generation in picosecond pulse trains
2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC
◽
10.1109/cleoe-iqec.2013.6800883
◽
2013
◽
Author(s):
Mikhail Martyanov
◽
Marta Divall
◽
Ekaterina Gacheva
◽
Christoph Hessler
◽
Valentin Fedosseev
Keyword(s):
High Power
◽
Uv Light
◽
Picosecond Pulse
◽
Pulse Trains
◽
Light Generation
Download Full-text
UV Light Generation in High-Quality CsB>inf<3>/inf<O>inf<5>/inf<Fabricated by Post-Growth Heat Treatments
2005 Pacific Rim Conference on Lasers & Electro-Optics
◽
10.1109/cleopr.2005.1569845
◽
2006
◽
Author(s):
N. Hisamianto
◽
M. Yoshimura
◽
T. Saji
◽
Y. Mori
◽
T. Sasaki
◽
...
Keyword(s):
Uv Light
◽
Heat Treatments
◽
High Quality
◽
Light Generation
Download Full-text
ChemInform Abstract: The Role of the Torsion of the Phenyl Moiety in the Mechanism of Stimulated UV Light Generation in 2-Phenylbenzazoles
ChemInform
◽
10.1002/chin.199220028
◽
2010
◽
Vol 23
(20)
◽
pp. no-no
Author(s):
J. CATALAN
◽
E. MENA
◽
F. FABERO
◽
F. AMAT-GUERRI
Keyword(s):
Uv Light
◽
Light Generation
◽
Phenyl Moiety
Download Full-text
Damage and degradation of optics and sensors under intense EUV radiation from a table-top laser produced plasma source
10.1117/12.837357
◽
2009
◽
Author(s):
Frank Barkusky
◽
Armin Bayer
◽
Bernhard Flöter
◽
Christian Peth
◽
Klaus Mann
Keyword(s):
Plasma Source
◽
Laser Produced Plasma
Download Full-text
First two-wave sum-frequency UV light generation in fiber from IR and green waves
Optics Communications
◽
10.1016/0030-4018(91)90299-s
◽
1991
◽
Vol 81
(1-2)
◽
pp. 80-84
◽
Cited By ~ 3
Author(s):
B. Poumellec
◽
J.M. Gabriagues
◽
D. Gardin
Keyword(s):
Uv Light
◽
Sum Frequency
◽
Light Generation
Download Full-text
Investigation of ions emitted from a tin fuelled laser produced plasma source
Journal of Physics Conference Series
◽
10.1088/1742-6596/163/1/012116
◽
2009
◽
Vol 163
◽
pp. 012116
◽
Cited By ~ 2
Author(s):
A O'Connor
◽
P Dunne
◽
O Morris
◽
F O'Reilly
◽
G O'Sullivan
◽
...
Keyword(s):
Plasma Source
◽
Laser Produced Plasma
Download Full-text
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