Characterization of Inhomogeneity in Silicon Dioxide Films on 4H-Silicon Carbide Epitaxial Substrate Using a Combination of Fourier Transform Infrared and Cathodoluminescence Spectroscopy

2014 ◽  
Vol 68 (10) ◽  
pp. 1176-1180 ◽  
Author(s):  
Masanobu Yoshikawa ◽  
Hirohumi Seki ◽  
Keiko Inoue ◽  
Yuichiro Nanen ◽  
Tsunenobu Kimoto
Keyword(s):  
Silicon Carbide ◽  
Fourier Transform ◽  
Silicon Dioxide ◽  
Fourier Transform Infrared ◽  
Silicon Dioxide Films ◽  
Cathodoluminescence Spectroscopy

scholarly journals Characterization of silicon dioxide films on 4H-SiC (0001) Si, (1-100) M, and (11-20) A faces by cathodoluminescence spectroscopy

2013 ◽  
Vol 102 (5) ◽  
pp. 051612 ◽  
Author(s):  
M. Yoshikawa ◽  
K. Inoue ◽  
H. Seki ◽  
Y. Nanen ◽  
M. Kato ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Cathodoluminescence Spectroscopy

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films

scholarly journals Development and characterization of silicon dioxide clad silicon carbide optics for terrestrial and space applications

2021 ◽  
Author(s):  
Tayaramma D.P.V. Jalluri ◽  
Girish M. Gouda ◽  
Arjun Dey ◽  
B. Rudraswamy ◽  
K.V. Sriram
Keyword(s):  
Silicon Carbide ◽  
Silicon Dioxide ◽  
Space Applications
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