The Role of Plasma Properties in Plasma Enhanced Atomic Layer Epitaxy

2021 ◽  
Author(s):  
S.G. Walton ◽  
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Plasma Properties

scholarly journals Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy

2019 ◽  
Vol 37 (6) ◽  
pp. 060909 ◽  
Author(s):  
David R. Boris ◽  
Virginia D. Wheeler ◽  
Jason R. Avila ◽  
Syed B. Qadri ◽  
Charles R. Eddy ◽  
...  
Keyword(s):  
Oxide Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Plasma Properties

Atomic layer epitaxy of GaAs and role of As‐source materials on self‐limiting mechanism

1992 ◽  
Vol 60 (12) ◽  
pp. 1498-1500 ◽  
Author(s):  
Kazuyuki Fujii ◽  
Ikuo Suemune ◽  
Tomoaki Koui ◽  
Masamichi Yamanishi
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Source Materials

The role of surface and gas phase reactions in atomic layer epitaxy

1989 ◽  
Vol 19 (1-2) ◽  
pp. 137-147 ◽  
Author(s):  
P.D. Dapkus ◽  
S.P. DenBaars ◽  
Q. Chen ◽  
W.G. Jeong ◽  
B.Y. Maa
Keyword(s):  
Gas Phase ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Gas Phase Reactions

Role of Hydrogen in Atomic Layer Epitaxy of GaAs Using GaCl3

1992 ◽  
Vol 31 (Part 2, No. 12B) ◽  
pp. L1730-L1732 ◽  
Author(s):  
Ryuji Kobayashi ◽  
Katsumi Ishikawa ◽  
Satoru Narahara ◽  
Fumio Hasegawa
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy

Role of interface strain in atomic layer epitaxy growth kinetics of InxGa1−xAs

1991 ◽  
Vol 114 (1-2) ◽  
pp. 31-37 ◽  
Author(s):  
Y. Sakuma ◽  
M. Ozeki ◽  
K. Kodama ◽  
N. Ohtsuka
Keyword(s):  
Growth Kinetics ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Interface Strain ◽  
Kinetics Of
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