Measurement of Stress and Strain of Single-Crystal-Silicon Thin Film during On-Chip Tensile Test
1999 ◽
Vol 119
(2)
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pp. 67-72
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2010 ◽
Vol 2010.2
(0)
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pp. 151-152
Keyword(s):
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1998 ◽
Vol 166
(2)
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pp. 715-728
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2006 ◽
Vol 14
(5)
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pp. S73-S83
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2008 ◽
Vol 2008.8
(0)
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pp. 159-160
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2010 ◽
Vol 2010.8
(0)
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pp. 263-264
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2015 ◽
Vol 2015.7
(0)
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pp. _30am2-PN--_30am2-PN-
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2006 ◽
Vol 27
(6)
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pp. 460-462
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