Measurement of Stress and Strain of Single-Crystal-Silicon Thin Film during On-Chip Tensile Test

1999 ◽  
Vol 119 (2) ◽  
pp. 67-72 ◽  
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Tetsuo Yoshioka ◽  
Mitsuhiro Shikida ◽  
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2006 ◽  
Vol 100 (1) ◽  
pp. 013708 ◽  
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2010 ◽  
Vol 2010.8 (0) ◽  
pp. 263-264
Author(s):  
Taeko ANDO ◽  
Hidekazu Ishihara ◽  
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2006 ◽  
Vol 27 (6) ◽  
pp. 460-462 ◽  
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