BaRuO3 thin film electrode for ferroelectric lead zirconate titanate capacitors

1999 ◽  
Vol 14 (10) ◽  
pp. 3833-3836 ◽  
Author(s):  
Sang-Mo Koo ◽  
Li-Rong Zheng ◽  
K. V. Rao
Keyword(s):  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Metallic Electrode ◽  
Axis Orientation ◽  
Pzt Film ◽  
Fatigue Characteristics ◽  
Fatigue Endurance ◽  
Better Than

The characteristics of a ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) capacitor on conductive BaRuO3 thin films deposited by pulsed laser deposition (PLD) were investigated. The BaRuO3 layer grown epitaxially on LaAlO3(100) substrates at a substrate temperature of 700 °C was found to have a resistivity around 145 μΩ cm at 300 K. The subsequently deposited PZT film showed a c-axis orientation perpendicular to the substrate, and the remnant polarization, ΔP (= P* – P^), and coercive field, EC, of the capacitor were 24.7 μC/cm2 and 52 kV/cm, respectively. Fatigue characteristics of the PZT on BaRuO3 electrodes are far better than those obtained with polycrystalline PZT with Pt structures and comparable to those on epitaxial Yba2Cu3O7−x electrodes. With the new metallic electrode, the PZT layer exhibits no serious degradation in fatigue endurance up to 1010 cycles.

Microstructure of Compositionally Graded PZT films Grown by Pulsed Laser Deposition

2008 ◽  
Vol 14 (S3) ◽  
pp. 53-56
Author(s):  
S.A.S. Rodrigues ◽  
A. Khodorov ◽  
M. Pereira ◽  
M.J.M. Gomes
Keyword(s):  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Film Growth ◽  
Pulsed Laser ◽  
Hysteresis Loops ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Composition Gradient ◽  
Complex Structures ◽  
Pzt Films

Ferroelectric films with a composition gradient have attracted much attention because of their large polarization offset present in the hysteresis loops. Lead Zirconate Titanate (PZT) films were deposited on Pt/TiO2/SiO2/Si substrates by Pulsed Laser Deposition (PLD) technique, using a Nd:YAG laser (Surelite) with a source pulse wavelength of 1064 nm and duration of 5-7 ns delivering an energy of 320 mJ per pulse and a laser fluence energy about 20 J/cm2. The film growth is performed in O2 atmosphere (0,40 mbar) while the substrate is heated at 600°C by a quartz lamp. Starting from ceramic targets based on PZT compositions and containing 5% mol. of excess of PbO to compensate the lead evaporation during heat treatment, three films with different compositions Zr/Ti 55/45, 65/35 and 92/8, and two types of complex structures were produced. These complex structures are in the case of the up-graded structure (UpG), with PZT (92/8) at the bottom, PZT (65/35) on middle and PZT (55/45) on the top, and for down-graded (DoG) one, that order is reversed.

Anion‐assisted pulsed laser deposition of lead zirconate titanate films

1992 ◽  
Vol 60 (10) ◽  
pp. 1193-1195 ◽  
Author(s):  
R. E. Leuchtner ◽  
K. S. Grabowski ◽  
D. B. Chrisey ◽  
J. S. Horwitz
Keyword(s):  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Zirconate Titanate

Growth and measurements of ferroelectric lead zirconate titanate on diamond by pulsed laser deposition

1999 ◽  
Vol 86 (4) ◽  
pp. 2220-2225 ◽  
Author(s):  
H. Du ◽  
D. W. Johnson ◽  
W. Zhu ◽  
J. E. Graebner ◽  
G. W. Kammlott ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Zirconate Titanate
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