Novel End-point Detection Method by Monitoring Shear Force Oscillation Frequency for Barrier Metal Polishing in Advanced LSI

2009 ◽  
Vol 1157 ◽  
Author(s):  
Xun Gu ◽  
Takenao Nemoto ◽  
Yasa Adi Sampurno ◽  
Jiang Cheng ◽  
Sian Nie Theng ◽  
...  
Keyword(s):  
Oscillation Frequency ◽  
Shear Force ◽  
Detection Method ◽  
Spectral Amplitude ◽  
Fast Fourier Transformation ◽  
Silicon Dioxide Film ◽  
End Point ◽  
End Point Detection ◽  
Barrier Metal ◽  
Point Detection

AbstractA novel end-point detection method based on a combination of shear force and its spectral amplitude was proposed for barrier metal polishing on copper damascene structures. Under some polishing conditions, the shear force changed significantly with polished substrate. On the other hand, the change in shear force was insignificant under certain polishing conditions. Therefore, a complementary end-point detection method by monitoring oscillation frequency of shear force was proposed. It was found that the shear force fluctuated in unique frequencies depending on polished substrates. Using Fast Fourier Transformation, the shear force data was converted from time domain to frequency domain. The amplitude of spectral frequencies corresponding to the rotational rate of wafer carrier and platen was monitored. Significant frequency amplitude changes were observed before, during and after the polished layer transition from barrier film to silicon dioxide film. The results indicated that a combination of shear force and its spectral amplitude analyses provided effective end-point detection for barrier CMP process.

Signal analysis of the end point detection method based on motor current

2003 ◽  
Vol 66 (1-4) ◽  
pp. 472-479 ◽  
Author(s):  
Sang-Yong Kim ◽  
Chang-Jun Park ◽  
Yong-Jin Seo
Keyword(s):  
Signal Analysis ◽  
Detection Method ◽  
Motor Current ◽  
End Point ◽  
End Point Detection ◽  
Point Detection

scholarly journals Acid number, viscosity and end-point detection in a multiphase high temperature polymerisation process using an online miniaturised MEMS Fabry-Pérot interferometer

Talanta ◽  
2021 ◽  
Vol 224 ◽  
pp. 121735
Author(s):  
Claudio Avila ◽  
Christos Mantzaridis ◽  
Joan Ferré ◽  
Rodrigo Rocha de Oliveira ◽  
Uula Kantojärvi ◽  
...  
Keyword(s):  
High Temperature ◽  
Acid Number ◽  
End Point ◽  
Fabry Perot ◽  
End Point Detection ◽  
Point Detection

Fluoroimmunoassay for human choriomammotropin.

1979 ◽  
Vol 25 (6) ◽  
pp. 973-975 ◽  
Author(s):  
T Chard ◽  
A Sykes
Keyword(s):  
Equipment Design ◽  
Radiation Hazard ◽  
Human Origin ◽  
End Point ◽  
End Point Detection ◽  
Purified Antigen ◽  
Point Detection

Abstract We describe an immunoassay for human choriomammo-tropin by use of the fluorescein-labeled hormone (of human origin). The technique is generally similar to the radioimmunoassay for this material, but has the advantage of stability of tracer and avoidance of radiation hazard. However, the procedure requires approximately 50-fold more tracer than does the radioimmunoassay, and this would be a disadvantage with materials for which supplies of purified antigen are scarce. Furthermore, both within-assay variation (3.9%) and between-assay variation (7.8--7.9%) were less satisfactory than that of radioimmunoassay (1.5% and 2.2--3%, respectively). This is almost certainly the result of imprecision of end-point detection and could probably be corrected by further attention to equipment design.

AEROBIC END-POINT DETECTION IN A SEQUENCING BATCH REACTOR

2005 ◽  
Vol 38 (1) ◽  
pp. 115-120
Author(s):  
Hilario López García ◽  
Iván Machón González
Keyword(s):  
Sequencing Batch Reactor ◽  
Batch Reactor ◽  
End Point ◽  
End Point Detection ◽  
Point Detection

Optical end point detection of etched YBCO films

1992 ◽  
Vol 191 (3-4) ◽  
pp. 525-529 ◽  
Author(s):  
R. Dolata ◽  
M. Fischer ◽  
W. Jutzi
Keyword(s):  
Ybco Films ◽  
End Point ◽  
End Point Detection ◽  
Point Detection
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