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Advanced Damascene integration using selective deposition of barrier metal with Self Assemble Monolayer

2021 ◽  
Author(s):  
H. Kawasaki ◽  
M. Iwashita ◽  
H. Warashina ◽  
H. Nagai ◽  
K. Iwai ◽  
...  
Keyword(s):  
Selective Deposition ◽  
Barrier Metal ◽  
Self Assemble Monolayer

Tribological and Kinetical Analysis of Barrier Metal Polishing for Next Generation Copper Interconnects

2019 ◽  
Vol 34 (1) ◽  
pp. 627-632
Author(s):  
Ricardo Duyos Mateo ◽  
Xun Gu ◽  
Takenao Nemoto ◽  
Shigetoshi Sugawa ◽  
Yun Zhuang ◽  
...  
Keyword(s):  
Copper Interconnects ◽  
Next Generation ◽  
Barrier Metal

A Novel Interconnection Technology Using Ultra-Thin Under Barrier Metal for Multiple Chip-on-Chip Stacking Structure

2019 ◽  
Author(s):  
Takuya Nakamura ◽  
Kan Shimizu ◽  
Masataka Maehara ◽  
Toshihiko Hayashi ◽  
Kentaro Akiyama ◽  
...  
Keyword(s):  
Barrier Metal ◽  
On Chip ◽  
Stacking Structure

SiC MPS Devices: One Step Closer to the Ideal Diode

2018 ◽  
Vol 924 ◽  
pp. 609-612 ◽  
Author(s):  
Rudolf Elpelt ◽  
Mihai Draghici ◽  
Rolf Gerlach ◽  
Roland Rupp ◽  
Reinhold Schörner
Keyword(s):  
Schottky Barrier ◽  
Schottky Barrier Height ◽  
Cell Design ◽  
Metal System ◽  
One Step ◽  
Barrier Metal ◽  
Ideal Diode ◽  
New Generation ◽  
Schottky Rectifier ◽  
The Ideal

We report on the development of a new generation of SiC Schottky rectifier devices employing a Molybdenum based barrier metal system and a new stripe cell design for field shielding and optimized area utilization. The Schottky barrier height is reduced and thus the conduction losses are decreased significantly. The balance between forward conduction and reverse leakage losses as well as the homogeneity and stability of the new barrier system are investigated carefully.

How thin barrier metal can be used to prevent Co diffusion in the modern integrated circuits?

2017 ◽  
Vol 50 (45) ◽  
pp. 455103 ◽  
Author(s):  
Hemant Dixit ◽  
Aniruddha Konar ◽  
Rajan Pandey ◽  
Tamilmani Ethirajan
Keyword(s):  
Integrated Circuits ◽  
Barrier Metal ◽  
Thin Barrier
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