CW Laser Crystallization of Soi Thermal analysis of the most critical parameters

1983 ◽  
Vol 23 ◽  
Author(s):  
J.M. Hode ◽  
J.P. Joly ◽  
P. Jeuch
Keyword(s):  
Thermal Analysis ◽  
Phase Change ◽  
Latent Heat ◽  
Layer Structure ◽  
Thermal Modeling ◽  
Critical Parameters ◽  
Laser Crystallization ◽  
Cw Laser ◽  
Analytical Expressions ◽  
Induced Crystallization

ABSTRACTWe present an overview of the thermal modeling of CW laser induced crystallization of SOI. The dynamical case for a three-layer structure is derived. Effects of the phase change (increase in reflectivity, latent heat) are also treated. Analytical expressions are given and the models are compared to experiment.

Thermal Analysis of Cw Laser Annealing Beyond the Melt Temperature

1980 ◽  
Vol 1 ◽  
Author(s):  
S A. Kokorowski ◽  
G. L. Olson ◽  
L. D. Hess
Keyword(s):  
Thermal Analysis ◽  
Laser Heating ◽  
Laser Annealing ◽  
Sample Temperature ◽  
Experimental Measurements ◽  
Melt Temperature ◽  
Temperature Distributions ◽  
Cw Laser ◽  
Analytical Expressions

ABSTRACTWe present a thermal analysis which treats the problem of melting as it occurs during cw laser heating. Analytical expressions for sample temperature distributions are derived, and calculated results are compared to experimental measurements.

THERMAL MODELING OF CW LASER-CRYSTALLIZATION OF SOI

1983 ◽  
Vol 44 (C5) ◽  
pp. C5-343-C5-350 ◽  
Author(s):  
J. M. Hode ◽  
J. P. Joly
Keyword(s):  
Thermal Modeling ◽  
Laser Crystallization ◽  
Cw Laser
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