Very Low Temperature Deposition of Polycrystalline Silicon Films with Micro-Meter-Order Grains on SiO2

1994 ◽  
Vol 355 ◽  
Author(s):  
Kun-Chin Wang ◽  
Tri-Rung Yew ◽  
Huey-Liang Hwang
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Polycrystalline Silicon Films ◽  
Very Low Temperature

scholarly journals Low Temperature Growth of Polycrystalline Silicon Films by RF Sputtering Method(1st Report).

1995 ◽  
Vol 61 (6) ◽  
pp. 829-833
Author(s):  
Hiroaki KAKIUCHI ◽  
Hideaki KAWABE ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Akihiro TAKEUCHI ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films
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