Fragmentation of C60 Molecules in Partially Ionized Fullerene Beam Deposition
Keyword(s):
X Ray
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ABSTRACTC60 films have been deposited using a partially ionized cluster beam deposition (PIBD) technique. The experimental results show that as Va. exceeds about 400 V almost all the C60 molecules fragmentate at collision with the substrate and the obtained films turn to be amorphous carbon layers at elevated Va, indicated by measurements of Raman spectra, X-ray diffraction, and ellipsometry.