Nuclear Magnetic Resonance Studies of Hydrogen in Amorphous Silicon

1996 ◽  
Vol 420 ◽  
Author(s):  
R. E. Norberg ◽  
P. A. Fedders ◽  
D. J. Leopold
Keyword(s):  
Nuclear Magnetic Resonance ◽  
Magnetic Resonance ◽  
Amorphous Silicon ◽  
Molecular Hydrogen ◽  
Hydrogenated Amorphous Silicon ◽  
High Quality ◽  
Magnetic Resonance Studies ◽  
Structural Configurations ◽  
Species Specific ◽  
Hydrogenated Amorphous

AbstractProton and deuteron NMR in hydrogenated amorphous silicon yield quantitative measures of species-specific structural configurations and their dynamics. Populations of silicon-bonded and molecular hydrogens correlate with photovoltaic quality, doping, illumination/dark anneal sequences, and with infrared and other characterizations. High quality films contain substantial populations of nanovoid-trapped molecular hydrogen.

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