Tem and Eels Investigation of a-C and ta-C Coated Field Emitters

1997 ◽  
Vol 498 ◽  
Author(s):  
A. F. Myers ◽  
E. B. Steel ◽  
M. Q. Dingt ◽  
S. M. Camphausen ◽  
W. B. Choi ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Amorphous Carbon ◽  
Field Emitters ◽  
Cathodic Arc Deposition ◽  
Transmission Electron ◽  
Electron Energy Loss ◽  
Cathodic Arc ◽  
Arc Deposition ◽  
Deposited Films ◽  
Deposition Techniques

ABSTRACTThe microstructure of highly sp2 bonded amorphous carbon and partially tetrahedrally bonded amorphous carbon deposited on needle-shaped molybdenum field emitters by pulsed laser ablation and cathodic arc deposition techniques was studied using transmission electron microscopy and electron energy loss spectroscopy. Undoped and nitrogen-doped films were included in this study. The undoped laser ablation films were approximately 50% sp2 at the emitter tip and 65% sp2 along the shank, while the N-doped laser ablation films were highly sp2 bonded both at the tip and along the shank. These laser ablation films were continuous and relatively uniform, exhibiting an isotropie microstructure at the emitter tip and a columnar microstructure along the shank. The cathodic arc deposited films were predominantly sp2 bonded both at the tip and along the shank; these films were non-uniform, with an isotropie microstructure at the tip and regions of isotropie, columnar, and mixed microstructure appearing along the shank.

Structure of high hardness cathodic-arc deposited carbon

1995 ◽  
Vol 53 ◽  
pp. 206-207
Author(s):  
D. L. Callahan ◽  
S. D. McAdams ◽  
S. Anders ◽  
A. Anders ◽  
I.G. Brown ◽  
...  
Keyword(s):  
High Hardness ◽  
Carbon Films ◽  
Peak Hardness ◽  
Nanocrystalline Phase ◽  
Substrate Bias ◽  
Plan View ◽  
Cathodic Arc Deposition ◽  
Transmission Electron ◽  
Cathodic Arc ◽  
Arc Deposition

Carbon films exhibiting a peak hardness of 59 GPa have been produced using pulsebiased cathodic-arc deposition. This value is much greater than that expected of an amorphous "diamond-like" carbon (die) film and is well within the hardness range of chemically vapor-deposited diamond. Furthermore, this peak hardness is observed at an indentation depth of approximately 50 nm and not on the upper surface of the film. A structural analysis by transmission electron microscopy (TEM) has been conducted in order to explain these mechanical phenomena.Details of the sputtering apparatus are described elsewhere. Films for this study were deposited on silicon using a two-step process in which a thin layer, approximately 10 nm, was first deposited at a relatively high substrate bias (~2 kV) followed by growth of the majority of the film at a lower bias (~200 V). Plan-view examination of carbon films revealed both uniformly amorphous regions and extensive nanocrystalline phase regions.

Ultrathin amorphous carbon overcoats by filtered cathodic arc deposition

2003 ◽  
Vol 39 (5) ◽  
pp. 2201-2204 ◽  
Author(s):  
T. Yamamoto ◽  
H. Hyodo ◽  
S. Tsuchitani ◽  
R. Kaneko
Keyword(s):  
Amorphous Carbon ◽  
Cathodic Arc Deposition ◽  
Carbon Overcoats ◽  
Cathodic Arc ◽  
Arc Deposition

Multilayers of amorphous carbon prepared by cathodic arc deposition

1997 ◽  
Vol 94-95 ◽  
pp. 189-194 ◽  
Author(s):  
Simone Anders ◽  
Daniel L. Callahan ◽  
George M. Pharr ◽  
Ting Y. Tsui ◽  
C. Singh Bhatia
Keyword(s):  
Amorphous Carbon ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

scholarly journals In-situ functionalization of tetrahedral amorphous carbon by filtered cathodic arc deposition

AIP Advances ◽  
2019 ◽  
Vol 9 (8) ◽  
pp. 085325 ◽  
Author(s):  
Sami Sainio ◽  
Niklas Wester ◽  
Charles J. Titus ◽  
Dennis Nordlund ◽  
Sang-jun Lee ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Tetrahedral Amorphous Carbon ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
In Situ Functionalization ◽  
Arc Deposition

scholarly journals Mechanical Properties of Amorphous Hard Carbon Films Prepared by Cathodic ARC Deposition

1995 ◽  
Vol 383 ◽  
Author(s):  
Simone Anders ◽  
André Anders ◽  
Joel W. Ager ◽  
Zhi Wang ◽  
George M. Pharr ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Deposition Process ◽  
Carbon Films ◽  
Carbon Ions ◽  
Hard Carbon ◽  
Cathodic Arc Deposition ◽  
Transmission Electron ◽  
As Stress ◽  
Cathodic Arc ◽  
Arc Deposition

ABSTRACTCathodic arc deposition combined with macroparticle filtering of the plasma is an efficient and versatile method for the deposition of amorphous hard carbon films of high quality. The film properties can be tailored over a broad range by varying the energy of the carbon ions incident upon the substrate and upon the growing film by applying a pulsed bias technique. By varying the bias voltage during the deposition process specific properties of the interface, bulk film and top surface layer can be obtained. We report on nanoindentation and transmission electron microscopy studies as well as stress measurements of cathodic-arc amorphous hard carbon films deposited with varied bias voltage. The investigations were performed on multilayers consisting of alternating hard and soft amorphous carbon.

Mechanical Properties of AlCrTiSiN Coatings Developed by Cathodic Arc for Protection Applications

2012 ◽  
Vol 185 ◽  
pp. 81-83 ◽  
Author(s):  
Nurot Panich ◽  
Surasak Surinphong ◽  
D.A. Karpov ◽  
Yong Kwang Tan ◽  
Chin Foo Goh ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
High Hardness ◽  
Ceramic Coatings ◽  
Coating Adhesion ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Hardness Values ◽  
Arc Deposition ◽  
Deposition Techniques ◽  
Superhard Coatings

The aim of this work is to fabricate and develop the innovative ceramic coatings for protection applications with both high hardness and coating adhesion particularly performing in extremely environmental conditions. In this study, nanocomposite AlCrTiSiN coatings were developed and deposited on Carbide coupons (WC with Co binder) substrate using Cathodic Arc Deposition techniques. The resultant coatings were evaluated with respect to fundamental mechanical properties such as hardness, modulus and coating adhesion. It was found that the nanomposite AlCrTiSiN coatings has a good adhesion to the substrate and retained extremely high hardness as superhard coatings with hardness values above 50 GPa.

Annealing of nonhydrogenated amorphous carbon films prepared by filtered cathodic arc deposition

2000 ◽  
Vol 88 (5) ◽  
pp. 2395-2399 ◽  
Author(s):  
O. R. Monteiro ◽  
J. W. Ager ◽  
D. H. Lee ◽  
R. Yu Lo ◽  
K. C. Walter ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

scholarly journals Effects of Polyurethane Substrate Pre-Treatment on Pulsed Cathodic Arc Deposited DLC Films

Coatings ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 545 ◽  
Author(s):  
Lijie Zhang ◽  
Xuemei Zong ◽  
Xiaoming Yuan ◽  
Xiaolei Xing
Keyword(s):  
Ultrasonic Treatment ◽  
Dry Friction ◽  
Dissolution Method ◽  
Cathodic Arc Deposition ◽  
Suitable Temperature ◽  
Pre Treatment ◽  
Surface Morphologies ◽  
Cathodic Arc ◽  
Arc Deposition ◽  
Deposited Films

Diamond-like carbon (DLC) films were deposited by means of pulsed cathodic arc deposition on pretreated polyurethane (PU) rubber substrates. Tetrachloroethylene was chosen as a dissolution method to remove the plasticizer added in the PU substrates. Scanning electron microscopy (SEM) and Raman spectroscopy were applied to observe and characterize the surface morphologies and compositions of the deposited films, respectively. The tribological behaviours of uncoated and coated rubbers were investigated with ring-on-disc tribo experiments under dry sliding conditions. The coefficients of friction (COFs) of the coated rubbers were 40% lower than those of uncoated rubber and the COFs of different samples decreased first and then increased slightly with the increase in temperature and the time of ultrasonic treatment under dry friction. Based on the above experiments, ultrasonic treatment with tetrachloroethylene contributes to the increase in the wear resistance of DLC films deposited on PU rubbers. The most suitable temperature and time of ultrasonic treatment with tetrachloroethylene is 50 °C for 15 min.

Study of the Structural and Mechanical Properties of Nanocrystalline TiAlSiN Gradient Coatings

2014 ◽  
Vol 27 ◽  
pp. 15-24 ◽  
Author(s):  
T. Cholakova ◽  
V. Chitanov ◽  
D. Chaliampalias ◽  
Lilyana Kolaklieva ◽  
R. Kakanakov ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Post Annealing ◽  
Cathodic Arc Deposition ◽  
Amorphous Si ◽  
Excellent Adhesion ◽  
Gradient Coatings ◽  
Average Size ◽  
Cathodic Arc ◽  
Arc Deposition ◽  
Deposition Techniques

A study of the structural and mechanical properties of nanocrystalline TiAlSiN gradient coatings deposited by cathodic arc deposition techniques at 500 °C and post-annealed at 525 °C is presented. Analysis of the coatings, chemical composition and microstructure revealed that the coatings have a structure based on (Ti, Al)N nanocrystals with an average size of 10 nm embedded in an amorphous Si3N4 phase. The study of the mechanical properties showed that post-annealing causes improvement and increase of the coatings hardness. A maximum hardness of 48 GPa and elastic modulus of 560 GPa were measured. Also, excellent adhesion to the WC-Co substrate was observed in the post-annealed coatings.

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