Study of Chromium-Doped Diamond-Like Carbon by Z-Contrast Imaging and Electron Energy Loss Spectroscopy
ABSTRACTMetal-doped diamond-like carbon films were produced for the purpose of an electrochemical nano-electrode. In this study we use Z-contrast scanning transmission electron microscopy to directly observe metal cluster formation and distributions within the chromium-doped carbon films. At low doping (∼6at%Cr), Cr is uniformly distributed; at high doping (∼12at%Cr), Cr-rich clusters are formed. Using electron energy loss spectroscopy, we find that the Cr clusters tend to be metallic-like at low doping levels and carbide-like at high doping levels according to the Cr L2.3 white line ratios. The carbon is more diamond-like at low doping and more graphite/carbide like at high doping according to the sp2/sp3 electron percentage measurements.