scholarly journals Applications of Atmospheric-Pressure Glow Plasma: Practical Uses of the Atmospheric-Pressure Plasma Processing Unit "Aiplasma"

2003 ◽  
Vol 79 (10) ◽  
pp. 1022-1028 ◽  
Author(s):  
Yasushi SAWADA
Keyword(s):  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Processing Unit ◽  
Pressure Plasma ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

Research on atmospheric pressure plasma processing sewage

2013 ◽  
Author(s):  
Gui-cai Song ◽  
Yan-xiang Na ◽  
Xiao-long Dong ◽  
Xiao-liang Sun
Keyword(s):  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Pressure Plasma

scholarly journals Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 828 ◽  
Author(s):  
Duo Li ◽  
Na Li ◽  
Xing Su ◽  
Peng Ji ◽  
Bo Wang
Keyword(s):  
Surface Roughness ◽  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Degree Of Freedom ◽  
Generation Mechanism ◽  
Surface Generation ◽  
Pressure Plasma ◽  
Simulation And Experiment ◽  
Grid Surface

Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surface generation mechanism are firstly presented. Both simulation and experiment validate the effectiveness of APPP to fabricate a sinusoidal grid surface with nanometric precision. Post mechanical polishing experiments show that APPP features can be well maintained while the surface roughness is greatly reduced to meet the optical requirement.

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