In this paper, the thermal oxidation behavior of TiAlCrSiN and AlCrTiN films coated on hastelloyX substrate, typically used for fuel nozzle in gas turbine engine application, have been studied. The thermal oxidation behavior at 950, 1050 and 1150 °C in controlled atmosphere were investigated. The surface appearance, microstructure, chemical composition and adhesion of films were investigated. The thermal oxidations were observed in all testing conditions showing oxide films at the surface with thicker oxide film at higher temperature. However, spalling of oxide scales was found in both coated and uncoated specimens at 1150°C suggesting the maximum working temperature of < 1150 °C for turbine engine applications. The critical loads corresponding to the full delamination of the thermal oxidation coated specimens were found to be higher than the non-thermal oxidation specimens. The effect of thermal oxidation on damage patterns during scratch tests, i.e. less chipping and cracking for thermal oxidation specimen, were also observed.