Low-Loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-Length and a Sub-Nanometer Surface Roughness

We develop a technique for realizing lithium niobate on insulator (LNOI) waveguides of a multi-centimeter-length with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium (Cr) thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by the chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides is determined to be 0.452 nm with an atomic force microscope (AFM). The approach is compatible with other surface patterning technologies such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.

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Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Nanomaterials ◽

10.3390/nano8110910 ◽

2018 ◽

Vol 8 (11) ◽

pp. 910 ◽

Cited By ~ 28

Author(s):

Rongbo Wu ◽

Min Wang ◽

Jian Xu ◽

Jia Qi ◽

Wei Chu ◽

...

Keyword(s):

Surface Roughness ◽

Integrated Circuits ◽

Large Scale ◽

Photonic Integrated Circuits ◽

Surface Patterning ◽

Propagation Loss ◽

Direct Writing ◽

Laser Direct Writing ◽

Low Loss ◽

Atomic Force

In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.

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Wafer-scale low-loss lithium niobate photonic integrated circuits

2020 IEEE Photonics Conference (IPC) ◽

10.1109/ipc47351.2020.9252499 ◽

2020 ◽

Author(s):

Kevin Luke ◽

Prashanta Kharel ◽

Christian Reimer ◽

Lingyan He ◽

Marko Loncar ◽

...

Keyword(s):

Lithium Niobate ◽

Integrated Circuits ◽

Photonic Integrated Circuits ◽

Low Loss ◽

Wafer Scale

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Nonpolymer new organic film for local insulation in laser‐direct‐writing circuit restructuring for large‐scale integrated circuits

Applied Physics Letters ◽

10.1063/1.109051 ◽

1993 ◽

Vol 62 (25) ◽

pp. 3375-3376 ◽

Cited By ~ 4

Author(s):

Y. Seki ◽

Y. Morishige ◽

N. Wamme ◽

Y. Ohnishi ◽

S. Kishida

Keyword(s):

Integrated Circuits ◽

Large Scale ◽

Direct Writing ◽

Laser Direct Writing ◽

Organic Film ◽

Local Insulation

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Propagation of Fundamental Mode in Regularly Bending Multi-Mode Waveguides

10.21203/rs.3.rs-179989/v1 ◽

2021 ◽

Author(s):

Hongyan Yu ◽

Xinyu Sun ◽

Dasai Ban ◽

Feng Qiu

Keyword(s):

Integrated Circuits ◽

Fundamental Mode ◽

Large Scale ◽

Photonic Integrated Circuits ◽

Optical Field ◽

Low Loss ◽

Scattering Loss ◽

Bending Radius ◽

Silicon Based ◽

Multi Mode

Abstract Transmission of the fundamental mode in multi-mode waveguides is an effective scheme for a silicon-based platform to reduce scattering loss. However, the application of the scheme is usually limited to straight waveguides and restricted in multi-mode bending waveguides. This is because the fundamental mode of a straight waveguide is seriously disordered after passing the bend. In this work, we have presented a “matched bending radius” approach, by which an ultra-low loss and negligible modal disorder have been demonstrated in the Si and Si3N4 multi-mode waveguides. The estimated optical field overlap factor is almost 0 dB at the matched bending radius, indicating that the fundamental mode can be re-generated after passing the multi-mode bending waveguide. The proposed approach will contribute to applying the low loss scheme in large-scale photonic integrated circuits.

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